scholarly journals Nanopowders Production and Micron-Sized Powders Spheroidization in DC Plasma Reactors

2018 ◽  
Author(s):  
Andrey Samokhin ◽  
Nikolay Alekseev ◽  
Mikhail Sinayskiy ◽  
Aleksey Astashov ◽  
Dmitrii Kirpichev ◽  
...  
Keyword(s):  
1986 ◽  
Vol 75 ◽  
Author(s):  
Harold F. Winters ◽  
D. Haarer

AbstractIt has been recognized for some time that the doping level in silicon influences etch rate in plasma environments[1–8]. We have now been able to reproduce and investigate these doping effects in a modulated-beam, mass spectrometer system described previously [9] using XeF2 as the etchant gas. The phenomena which have been observed in plasma reactors containing fluorine atoms are also observed in our experiments. The data has led to a model which explains the major trends.


2020 ◽  
Vol 48 (12) ◽  
pp. 4204-4214
Author(s):  
Jiayin Li ◽  
Fan Wu ◽  
Lanlan Nie ◽  
Xinpei Lu ◽  
Kostya Ostrikov

2011 ◽  
Vol 196 ◽  
pp. 86-92 ◽  
Author(s):  
Ioanna Kourti ◽  
Amutha Rani Devaraj ◽  
Ana Guerrero Bustos ◽  
David Deegan ◽  
Aldo R. Boccaccini ◽  
...  

2014 ◽  
Vol 258 ◽  
pp. 219-224 ◽  
Author(s):  
S.M.M. Dufrène ◽  
F. Cemin ◽  
M.R.F. Soares ◽  
C. Aguzzoli ◽  
M.E.H. Maia da Costa ◽  
...  

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