scholarly journals Epitaxial Growth of Ge on Si by Magnetron Sputtering

Epitaxy ◽  
2018 ◽  
Author(s):  
Ziheng Liu ◽  
Xiaojing Hao ◽  
Anita Ho-Baillie ◽  
Martin A. Green
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth

scholarly journals Epitaxial growth and characterization of Cu thin films deposited on Al2O3(0001) substrates by magnetron sputtering

2021 ◽  
pp. 130119
Author(s):  
Ik-Jae Lee ◽  
Hee Seob Kim ◽  
Young Duck Yun ◽  
Seen-Woong Kang ◽  
Hyo-Yun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth

Epitaxial growth of Cu(111) films on Si(110) by magnetron sputtering: orientation and twin growth

1998 ◽  
Vol 315 (1-2) ◽  
pp. 13-16 ◽  
Author(s):  
H Jiang ◽  
T.J Klemmer ◽  
J.A Barnard ◽  
W.D Doyle ◽  
E.A Payzant
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Twin Growth

Epitaxial growth of ZnO on GaN/sapphire substrate by radio-frequency magnetron sputtering

2010 ◽  
Vol 31 (9) ◽  
pp. 093001 ◽  
Author(s):  
Yang Xiaoli ◽  
Chen Nuofu ◽  
Yin Zhigang ◽  
Zhang Xingwang ◽  
Li Yang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Sapphire Substrate ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Epitaxial Growth of Bi 2 Sr 2-x La x Cu 1 O 6+δ Thin Films by In-Situ dc Magnetron Sputtering

1998 ◽  
Vol 15 (5) ◽  
pp. 373-375 ◽  
Author(s):  
Ying-zi Zhang ◽  
Duo-gui Yang ◽  
Lin Li ◽  
Bai-ru Zhao ◽  
Shun-lian Jia ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Dc Magnetron Sputtering

Quasi-Epitaxial Growth of Silicon Layers by Hydrogen Reactive Magnetron Sputtering at Temperatures as Low as 200 °C

2001 ◽  
Vol 80-81 ◽  
pp. 65-70 ◽  
Author(s):  
Y. Leconte ◽  
Richard Rizk ◽  
F. Gourbilleau ◽  
P. Voivenel ◽  
M. Lejeune ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Low-temperature epitaxial growth of conductive LaNiO3 thin films by RF magnetron sputtering

2002 ◽  
Vol 410 (1-2) ◽  
pp. 114-120 ◽  
Author(s):  
Naoki Wakiya ◽  
Takaaki Azuma ◽  
Kazuo Shinozaki ◽  
Nobuyasu Mizutani
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Rf Magnetron Sputtering
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