scholarly journals Vanadium Oxide Thin Films Obtained by Thermal Annealing of Layers Deposited by RF Magnetron Sputtering at Room Temperature

10.5772/67054 ◽  
2017 ◽  
Author(s):  
Hernan M.R. Giannetta ◽  
Carlos Calaza ◽  
Liliana Fraigi ◽  
Luis Fonseca
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Thermal Annealing ◽  
Room Temperature ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Vanadium oxide thin films prepared by RF magnetron sputtering method

2004 ◽  
Author(s):  
Zhishuan Li ◽  
Suntao Wu ◽  
Jing Li ◽  
Donghui Guo ◽  
Fuchun Xu
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Physical properties and phase transition observed in vanadium oxide thin films deposited by RF magnetron sputtering

2019 ◽  
Vol 6 (5) ◽  
pp. 056415
Author(s):  
Dwight Acosta ◽  
G Chavez-Esquivel ◽  
Carlos Magaña ◽  
Francisco Hernández ◽  
A Pérez-Pacheco ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Magnetron Sputtering ◽  
Physical Properties ◽  
Vanadium Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Vanadium oxide thin films deposited on silicon dioxide buffer layers by magnetron sputtering

2006 ◽  
Vol 497 (1-2) ◽  
pp. 267-269 ◽  
Author(s):  
Sihai Chen ◽  
Hong Ma ◽  
Shuangbao Wang ◽  
Nan Shen ◽  
Jing Xiao ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Silicon Dioxide ◽  
Vanadium Oxide ◽  
Buffer Layers ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Reactive DC Magnetron Sputtering of Vanadium Oxide Thin Films

2008 ◽  
Vol 587-588 ◽  
pp. 343-347 ◽  
Author(s):  
C. Batista ◽  
J. Mendes ◽  
Vasco Teixeira ◽  
Joaquim Carneiro
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Single Phase ◽  
Oxide Films ◽  
Wide Field ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films ◽  
Vanadium Oxide Films

Vanadium oxides are a class of materials with outstanding physical and chemical properties. They find a wide field of technological applications such as optical and electrical switching devices, light detectors, temperature sensors, micro batteries, etc. There are several studies regarding the production of vanadium oxide films by radio-frequency (RF) magnetron sputtering, and with increasing interest on the thermochromic VO2 phase. However, literature with focus on vanadium oxide films deposited by direct current (DC) magnetron sputtering is very limited. In this work, we have successfully deposited vanadium oxide thin films by reactive DC magnetron sputtering under several processing conditions. The effect of substrate type, temperature, and O2/Ar flow ratio on phase formation has been studied. Structural analysis and phase determination have been carried out by X-ray diffractometry (XRD). Some single phase samples were also analysed with respect to surface morphology by means of scanning electron microscopy (SEM) and atomic force microscopy (AFM). The thermochromic behaviour of single phase VO2(M) films has been evaluated by optical spectrophotometry.

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