scholarly journals FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)

10.5772/48532 ◽  
2012 ◽  
Author(s):  
Hao Ren ◽  
Jun Yao
Keyword(s):  
Spatial Light Modulator ◽  
Mechanical Systems ◽  
Light Modulator ◽  
Micro Electro Mechanical Systems

Micro-electro-mechanical systems spatial light modulator development

2000 ◽  
Author(s):  
Scot S. Olivier ◽  
Paul A. Bierden ◽  
Thomas G. Bifano ◽  
David J. Bishop ◽  
Emily Carr ◽  
...  
Keyword(s):  
Spatial Light Modulator ◽  
Mechanical Systems ◽  
Light Modulator ◽  
Micro Electro Mechanical Systems

Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems

2011 ◽  
Vol 36 (7) ◽  
pp. 1089 ◽  
Author(s):  
Wei-Chao Chiu ◽  
Chun-Che Chang ◽  
Jiun-Ming Wu ◽  
Ming-Chang M. Lee ◽  
Jia-Min Shieh
Keyword(s):  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Optical Phase ◽  
Phase Modulators ◽  
Optical Phase Modulators
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