scholarly journals FAIMS Biochemical Sensor Based on MEMS Technology

Author(s):  
Fei Tang ◽  
Xiaohao Wang ◽  
Chulong Xu
2013 ◽  
Vol 133 (5) ◽  
pp. 139-146
Author(s):  
Takaaki Suzuki ◽  
Kyohei Terao ◽  
Hiroyuki Suzuki ◽  
Yuki Nitta ◽  
Hidekuni Takao ◽  
...  

Equipment ◽  
2006 ◽  
Author(s):  
K. Fushinobu ◽  
D. Takahashi ◽  
T. Miura ◽  
Ken Okazaki
Keyword(s):  

ROBOT ◽  
2011 ◽  
Vol 33 (3) ◽  
pp. 366-370 ◽  
Author(s):  
Pengcheng CHI ◽  
Weiping ZHANG ◽  
Wenyuan CHEN ◽  
Hongyi LI ◽  
Kun MENG ◽  
...  

Plasmonics ◽  
2021 ◽  
Author(s):  
Mohammad Rakibul Islam ◽  
Fahim Yasir ◽  
Md. Rakib Hossain Antor ◽  
Mahmudul Hassan Turja ◽  
Ashikur Rahman ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 69
Author(s):  
Yong Hua ◽  
Shuangyuan Wang ◽  
Bingchu Li ◽  
Guozhen Bai ◽  
Pengju Zhang

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.


Sensors ◽  
2021 ◽  
Vol 21 (15) ◽  
pp. 5123
Author(s):  
Homare Yoshida ◽  
Yoshihiro Hasegawa ◽  
Miyoko Matsushima ◽  
Tomoshi Sugiyama ◽  
Tsutomu Kawabe ◽  
...  

A respiratory measurement system composed of pressure and airflow sensors was introduced to precisely control the respiratory condition during animal experiments. The flow sensor was a hot-wire thermal airflow meter with a directional detection and airflow temperature change compensation function based on MEMS technology, and the pressure sensor was a commercially available one also produced by MEMS. The artificial dead space in the system was minimized to the value of 0.11 mL by integrating the two sensors on the same plate (26.0 mm × 15.0 mm). A balloon made of a silicone resin with a hardness of A30 was utilized as the simulated lung system and applied to the elasticity evaluation of the respiratory system in a living rat. The inside of the respiratory system was normally pressurized without damage, and we confirmed that the developed system was able to evaluate the elasticity of the lung tissue in the rat by using the pressure value obtained at the quasi-static conditions in the case of the ventilation in the animal experiments.


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