scholarly journals GaN Nanowires Fabricated by Magnetron Sputtering Deposition

10.5772/16355 ◽  
2011 ◽  
Author(s):  
Feng Shi
Keyword(s):  
Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Gan Nanowires

Preparation and Characterization of Mg-Doped GaN Nanowires by Au-Catalyzed Magnetron Sputtering Deposition

2014 ◽  
Vol 809-810 ◽  
pp. 193-200 ◽  
Author(s):  
Ru Guo Liang ◽  
Rui Liang ◽  
Gang Cao ◽  
Feng Shi
Keyword(s):  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Hexagonal Wurtzite Structure ◽  
X Ray Diffraction ◽  
Sputtering Deposition ◽  
X Ray ◽  
Gan Nanowires ◽  
Microstructure Morphology ◽  
Au Thin Films ◽  
Mg Doped

Mg-doped GaN nanowires have been successfully synthesized on Si (111) substrates by magnetron sputtering deposition through ammoniating Ga2O3/Au thin films at 900 °C for 15 min. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum were carried out to characterize microstructure, morphology, and optical property of GaN sample. The results demonstrate that the nanowires are single-crystal Mg-doped GaN with hexagonal wurtzite structure and high crystalline quality, which have the size of 40 nm in diameter and several tens of microns in length and good emission property. The growth procedure mainly follows the VLS mechanism, and Au plays an important role as catalyst, and more defect energy is formed due to metallic Au and thus promote the growth of GaN nanowires.

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

Preparation of Sn doped SiO2thin films by magnetron sputtering deposition using metal and metal-oxide powder targets

2018 ◽  
Vol 58 (SA) ◽  
pp. SAAD04 ◽  
Author(s):  
Hiroharu Kawasaki ◽  
Tamiko Ohshima ◽  
Yoshihito Yagyu ◽  
Takeshi Ihara ◽  
Masanori Shinohara ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Metal Oxide ◽  
Oxide Powder ◽  
Sputtering Deposition ◽  
Metal Oxide Powder
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