scholarly journals Application of Sliding Mode Control to Friction Compensation of a Mini Voice Coil Motor

10.5772/15770 ◽  
2011 ◽  
Author(s):  
Shir-Kuan Lin ◽  
Ti-Chung Lee ◽  
Ching-Lung Tsai
Keyword(s):  
Sliding Mode Control ◽  
Sliding Mode ◽  
Voice Coil Motor ◽  
Friction Compensation ◽  
Mode Control

Design of Coarse-Fine Combined Synchronization Control System for Lithography Based on Cross-Coupled Sliding Mode Control

2011 ◽  
Vol 383-390 ◽  
pp. 2126-2131
Author(s):  
Zhi Pen Wu ◽  
Xing Lin Chen
Keyword(s):  
Control System ◽  
Sliding Mode Control ◽  
Sliding Mode ◽  
Dynamic Performance ◽  
Voice Coil Motor ◽  
Synchronization Error ◽  
Control Error ◽  
High Position ◽  
Mode Control ◽  
Order Of Magnitude

In order to achieve high position precision and synchronization between the wafer stage and the reticle stage, a cross-coupled sliding mode control scheme for a coarse-fine combined synchronization servo system of lithography is proposed. To accomplish high bandwidth and high tracking precision, a conventional linear motor is combined with a voice coil motor as a coarse-fine dual-stage control system. A cross-coupled structure is presented to decrease the synchronization error during scanning operation. Sliding mode control law is designed based on the control error and the synchronization error. Simulation results show that the synchronization error and the control error have the same order of magnitude, and the dynamic performance of the control system satisfies the design requirement.

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