scholarly journals Quick External Leakage Inspection Method for Gas Supplying System in Semiconductor Facility Using Atmospheric Pressure Ionization Mass Spectrometer.

1996 ◽  
Vol 44 (2) ◽  
pp. 165-174 ◽  
Author(s):  
Yasuhiro MITSUI ◽  
Tadahiro OHMI ◽  
Atsushi OHKI ◽  
Shigeki HAYASHI
Keyword(s):  
Mass Spectrometer ◽  
Atmospheric Pressure ◽  
Ionization Mass ◽  
Atmospheric Pressure Ionization ◽  
Inspection Method

scholarly journals Studies of the mechanism of the cluster formation in a thermally sampling atmospheric pressure ionization mass spectrometer

2014 ◽  
Vol 85 (1) ◽  
pp. 014102 ◽  
Author(s):  
Sascha Albrecht ◽  
Sebastian Klopotowski ◽  
Valerie Derpmann ◽  
Sonja Klee ◽  
Klaus J. Brockmann ◽  
...  
Keyword(s):  
Mass Spectrometer ◽  
Atmospheric Pressure ◽  
Cluster Formation ◽  
Ionization Mass ◽  
Atmospheric Pressure Ionization

Quantitative Analysis of Trace Water in Highly Puified Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer

1995 ◽  
Vol 34 (Part 1, No. 9A) ◽  
pp. 4991-4996 ◽  
Author(s):  
Yasuhiro Mitsui ◽  
Takashi Irie ◽  
KazuakiMizokami ◽  
Katsumi Kuriyama ◽  
KazuoNakano ◽  
...  
Keyword(s):  
Quantitative Analysis ◽  
Mass Spectrometer ◽  
Atmospheric Pressure ◽  
Ionization Mass ◽  
Atmospheric Pressure Ionization ◽  
Nitrogen Gas ◽  
Trace Water

Impurity Measurement in Specialty Gases Using an Atmospheric Pressure Ionization Mass Spectrometer with a Two-Compartment Ion Source

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2688-2693 ◽  
Author(s):  
Masafumi Kitano ◽  
Yasuyuki Shirai ◽  
Atsushi Ohki ◽  
Shinichi Babasaki ◽  
Tadahiro Ohmi
Keyword(s):  
Mass Spectrometer ◽  
Atmospheric Pressure ◽  
Ion Source ◽  
Ionization Mass ◽  
Atmospheric Pressure Ionization
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