scholarly journals The Development of a New Measuring Method for Young's Modulus in Flexible Thin Plate/Wire (Own-Weight Cantilever Method)

2010 ◽  
pp. 39-44 ◽  
Author(s):  
Atsumi OHTSUKI ◽  
Masatoshi SUZUKI
Keyword(s):  
Young’S Modulus ◽  
Thin Plate ◽  
Young's Modulus ◽  
Measuring Method

An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency

2012 ◽  
Vol 503 ◽  
pp. 308-311
Author(s):  
Han Chen ◽  
Hua Rong
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Young’S Modulus ◽  
Circular Plate ◽  
Material Property ◽  
Young's Modulus ◽  
Measuring Method ◽  
Test Structure ◽  
Film Research

Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young’s modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.

scholarly journals The measuring method about Young's modulus of plastics using the indenting hardness test by a spherical indenter.

1987 ◽  
Vol 53 (495) ◽  
pp. 2193-2202 ◽  
Author(s):  
Tatsuya ISHIBASHI ◽  
Shigeru SHIMODA ◽  
Tooru FURUKAWA ◽  
Isami NITTA ◽  
Hidetoshi YOSHIDA
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Hardness Test ◽  
Measuring Method ◽  
Spherical Indenter
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