scholarly journals P8.3 - Design, Fabrication and Characterization of a Novel 3D Force Sensor Made of SU-8

2011 ◽  
Author(s):  
A. Jordan ◽  
A. Phataralaoha ◽  
A. Tibrewala ◽  
S. Büttgenbach
Keyword(s):  
Force Sensor ◽  
Fabrication And Characterization

Design, Fabrication, and Characterization of Piezoresistive MEMS Shear Stress Sensors

2005 ◽  
Author(s):  
A. Alvin Barlian ◽  
Sung-Jin Park ◽  
Vikram Mukundan ◽  
Beth L. Pruitt
Keyword(s):  
Shear Stress ◽  
Force Sensor ◽  
Lateral Force ◽  
Stress Sensors ◽  
Silicon Cantilever ◽  
Shear Stress Sensors ◽  
Out Of Plane ◽  
Order Of Magnitude ◽  
Fabrication And Characterization

This paper presents the design, fabrication, and characterization of unique piezoresistive microfabricated shear stress sensors for direct measurements of shear stress underwater. The uniqueness of this design is in its transduction scheme which uses sidewall-implanted piezoresistors to measure lateral force (and shear stress), along with traditional top-implanted piezoresistors to detect normal forces. Aside from the oblique-implant technique, the fabrication process also includes hydrogen anneal step to smooth scalloped silicon sidewalls due to Deep Reactive Ion Etch process, which was shown to reduce 1/f noise level by almost an order of magnitude for the sidewall-implanted piezoresistors. Lateral sensitivity characterization of the sensors was done using a microfabricated silicon cantilever force sensor, while out-of-plane characterization was done using Laser Doppler Vibrometry technique. In-plane sensitivity and out-of-plane crosstalk were characterized, as well as hysteresis and repeatability of the measurements. The sensors are designed to be used underwater for various applications.

Simulation, fabrication and characterization of a 3D piezoresistive force sensor

2008 ◽  
Vol 147 (2) ◽  
pp. 430-435 ◽  
Author(s):  
A. Tibrewala ◽  
A. Phataralaoha ◽  
S. Büttgenbach
Keyword(s):  
Force Sensor ◽  
Fabrication And Characterization

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization

Fabrication and Characterization of Chain-like Arrangement of Gold Nanoparticles using Nanotemplates

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata
Keyword(s):  
Gold Nanoparticles ◽  
Fabrication And Characterization

Fabrication and Characterization of Metal-to-Metal Interconnect Structures for 3-D Integration

2008 ◽  
Author(s):  
Alan Huffman ◽  
John Lannon ◽  
Matthew Lueck ◽  
Christopher Gregory ◽  
Dorota Temple
Keyword(s):  
Fabrication And Characterization
Sign in / Sign up

Export Citation Format

Share Document