B8.3 - Application of Sacrificial Layers for the Modular Micro Sensor Fabrication on a Flexible Polymer Substrate
Keyword(s):
2019 ◽
Vol 7
(24)
◽
pp. 7395-7398
◽
Keyword(s):
2011 ◽
Vol 258
(2)
◽
pp. 748-754
◽
Keyword(s):
2009 ◽
Vol 20
(1)
◽
pp. 015030
◽
2011 ◽
Vol 19
(5)
◽
pp. 560-564
◽
2020 ◽
Vol 190
◽
pp. 108045
◽
Keyword(s):