Coating, Titanium Nitride, Physical Vapor Deposition
1997 ◽
Vol 26
(11)
◽
pp. 1297-1302
◽
2001 ◽
Vol 4
(3)
◽
pp. 163-168
◽
2002 ◽
Vol 20
(2)
◽
pp. 379-387
◽