Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages
2008 ◽
Vol 31
(6)
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pp. 897-911
Keyword(s):
2020 ◽
Vol 51
◽
pp. 30-38
◽
2003 ◽
Vol 11
(1)
◽
pp. 24-34
◽
Keyword(s):
Keyword(s):