scholarly journals Optimizing the Conditions for Residual Stress Measurement Using a Two-Dimensional XRD Method with Specimen Oscillation

2013 ◽  
Vol 03 (01) ◽  
pp. 8-18 ◽  
Author(s):  
Osamu Takakuwa ◽  
Hitoshi Soyama
Keyword(s):  
Residual Stress ◽  
Stress Measurement ◽  
Residual Stress Measurement ◽  
Two Dimensional ◽  
Xrd Method

Micro-Area Residual Stress Measurement Using a Two-Dimensional Detector

2000 ◽  
Vol 347-349 ◽  
pp. 101-106 ◽  
Author(s):  
Bob B. He ◽  
Kingsley L. Smith ◽  
Uwe Preckwinkel ◽  
Willard schultz
Keyword(s):  
Residual Stress ◽  
Stress Measurement ◽  
Residual Stress Measurement ◽  
Two Dimensional

Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam

2004 ◽  
Vol 126 (4) ◽  
pp. 457-464 ◽  
Author(s):  
Ki-Ju Kang ◽  
Severine Darzens ◽  
Gee-Seob Choi
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Carbon Film ◽  
Slot Width ◽  
Residual Stress Measurement ◽  
Two Dimensional ◽  
Slot Length

Recently, a new method for residual stress measurement in thin films by using the focused ion beam (FIB) has been proposed by the authors. It is based on the combined capability of the FIB imaging system and of high-resolution strain mapping software (VIC-2D). A simple equation based on two-dimensional elasticity is used to evaluate the residual stress from the displacements due to introducing a slot. The slot length is assumed to be much larger than the slot width or depth. And the effect of the slot width was neglected. However, it is often hard, depending on film materials, to introduce a narrow and deep slot by FIB. In this work some practical issues regarding the slot geometry are addressed. Through two- and three-dimensional finite element analyses, it is explored how the slot length, width and measurement location affect the displacements which are the basic data for residual stress evaluation. As a result, the validity and limit of the equations based on two-dimensional elasticity are evaluated. Also, the effect of material dissimilarity between film and substrate is explored. Finally, examples for a diamond-like carbon film on glass substrate and an aluminum oxide film thermally grown upon an alloy are presented.

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