HMDS Treatment of Ordered Mesoporous Silica Film for Low Dielectric Application
Keyword(s):
2008 ◽
Vol 326
(1)
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pp. 186-190
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2016 ◽
Vol 88
(23)
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pp. 11707-11713
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Keyword(s):
2010 ◽
Vol 25
(2-4)
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pp. 140-144
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Keyword(s):
2008 ◽
Vol 111
(1-3)
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pp. 188-193
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2008 ◽
Vol 34
(4)
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pp. 947-951
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