Special Issue. Surface Control Technolgy for LSI Processes. High Purification of Chemicals.

Tsutomu YONEZAWA

doi:10.4139/sfj.45.32

Special Issue. Surface Control Technolgy for LSI Processes. High Purification of Chemicals.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.32 ◽

1994 ◽

Vol 45 (1) ◽

pp. 32-37

Author(s):

Tsutomu YONEZAWA

Keyword(s):

Special Issue ◽

Surface Control ◽

High Purification

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Special Issue. Surface Control Technology for LSI Processs. High Purification of Semiconductor Gas.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.38 ◽

1994 ◽

Vol 45 (1) ◽

pp. 38-42

Author(s):

Takuya Ikeda

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control ◽

High Purification

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Special Issue. Surface Control Technology for LSI Processes. Cr2O3 and NiF2 Passivation Technology of Metal Surface.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.26 ◽

1994 ◽

Vol 45 (1) ◽

pp. 26-31 ◽

Cited By ~ 1

Author(s):

Tadahiro OHMI

Keyword(s):

Metal Surface ◽

Control Technology ◽

Special Issue ◽

Surface Control

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Special/Issue. Surface Control Technology for LSI Processes. Roughness Evaluation of Silicon Surfaces by Scanning Force Miroscopy.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.17 ◽

1994 ◽

Vol 45 (1) ◽

pp. 17-21

Author(s):

Mineharu SUZUKI

Keyword(s):

Silicon Surfaces ◽

Control Technology ◽

Special Issue ◽

Surface Control ◽

Scanning Force ◽

Roughness Evaluation

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Special Issue. Surface Control Technology for LSI Processes. Analysis of Metallic Contamination on a Wafer.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.6 ◽

1994 ◽

Vol 45 (1) ◽

pp. 6-11 ◽

Cited By ~ 1

Author(s):

Tsuneo AJIOKA

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control ◽

Metallic Contamination

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Special Issue. Surface Control Technology for LSI Processes. Technological Importance of Surface Control Science from Manufacturing Viewpoint.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.2 ◽

1994 ◽

Vol 45 (1) ◽

pp. 2-5

Author(s):

Atsuyoshi KOIKE

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control

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Special Issue. Surface Control Technology for LSI Processes. Silicon Native Oxide.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.12 ◽

1994 ◽

Vol 45 (1) ◽

pp. 12-16

Author(s):

Takeo HATTORI

Keyword(s):

Native Oxide ◽

Control Technology ◽

Special Issue ◽

Surface Control

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Special Issue. Adhesion of Organic Coatings. Substrate Surface Control and Adhesion of Organic Coatings.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.752 ◽

1994 ◽

Vol 45 (8) ◽

pp. 752-756

Author(s):

Takao MURAKAWA

Keyword(s):

Substrate Surface ◽

Organic Coatings ◽

Special Issue ◽

Surface Control

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Special Issue Tackles SLI

ASHA Leader ◽

10.1044/leader.rib3.19102014.14 ◽

2014 ◽

Vol 19 (10) ◽

pp. 14-14

Keyword(s):

Special Issue

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John A. Pople Special Issue

Molecular Physics ◽

10.1080/00268979709482768 ◽

1997 ◽

Vol 91 (5) ◽

pp. 775-775

Keyword(s):

Special Issue

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ANNOUNCEMENT: John A. Pople Special Issue

Molecular Physics ◽

10.1080/00268979650025722 ◽

1996 ◽

Vol 88 (5) ◽

pp. 1155-1156

Keyword(s):

Special Issue

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