Novel Technology Options for Multilayer-Based Ceramic Microsystems

2011 ◽  
Vol 8 (3) ◽  
pp. 95-101 ◽  
Author(s):  
Uwe Partsch ◽  
Adrian Goldberg ◽  
Martin Ihle ◽  
Gunter Hagen ◽  
D. Arndt
Keyword(s):  
New Technology ◽  
Pressure Sensors ◽  
Cell System ◽  
Uv Laser ◽  
Fuel Cell System ◽  
Novel Technology ◽  
Jet Printing ◽  
Cofired Ceramics ◽  
Aerosol Jet Printing ◽  
New Machine

Ceramic multilayer technologies such as LTCC (low temperature cofired ceramics) or HTCC (high temperature cofired ceramics) are applied for the fabrication of highly integrated ceramic microelectronic packages. Furthermore, ceramic multilayer technologies offer the possibility of additionally integrating 3D structures for multilayer-based microsystems. This paper presents a new machine for tape/multilayer structuring that combines micro punching tools and micro UV-laser ablation/cutting. The application for the production of different multilayer-based components is described (e.g., LTCC-based PEM fuel cell system, LTCC-based pressure sensors). Aerosol jet printing is a new technology, for example, for rapid prototyping for LTCC multilayer and 3D deposition of functional layers on LTCC. Advantages and limitations of the technology are discussed.

Novel Technology Options for Multilayer-Based Ceramic Microsystems

2011 ◽  
Vol 2011 (CICMT) ◽  
pp. 000166-000171
Author(s):  
Uwe Partsch ◽  
Adrian Goldberg ◽  
Martin Ihle ◽  
Gunter Hagen ◽  
D. Arndt
Keyword(s):  
New Technology ◽  
Pressure Sensors ◽  
Pem Fuel Cell ◽  
Cell System ◽  
Uv Laser ◽  
Fuel Cell System ◽  
Novel Technology ◽  
Aerosol Printing ◽  
Cofired Ceramics ◽  
New Machine

Ceramic multilayer technologies as LTCC (Low Temperature Cofired Ceramics) or HTCC (High Temperature Cofired Ceramics) are applied for the fabrication of highly integrated ceramic microelectronic packages. Furthermore ceramic multilayer technologies offer the possibility of the additional integration of 3-D-structures for multilayer-based microsystems. The paper presents a new machine for tape/ multilayer structuring combining micro punching tools and micro UV-laser ablation/ cutting. The application for the production of different multilayer based components is described (e.g. LTCC-based PEM fuel cell system, LTCC-based pressure sensors). Aerosol printing is a new technology e.g. for rapid prototyping for LTCC multilayer and 3-D-deposition of functional layers on LTCC. Advantages and limitations of the technology are discussed.

Aerosol jet printing of two component thick film resistors on LTCC

2013 ◽  
Vol 2013 (CICMT) ◽  
pp. 000240-000246 ◽  
Author(s):  
K. Swiecinski ◽  
M. Ihle ◽  
R. Jurk ◽  
E. Dietzen ◽  
U. Partsch ◽  
...  
Keyword(s):  
Particle Size ◽  
Thick Film ◽  
Glass Powder ◽  
New Technology ◽  
Organic Additives ◽  
Powder Mixtures ◽  
Conducting Phase ◽  
Aerodynamic Properties ◽  
Jet Printing ◽  
Aerosol Jet Printing

Aerosol jet printing is a rather new technology for the deposition of thick film structures offering high line and space resolution. This offers a high potential for miniaturization for thick film structures. The advantages of this technology could be shown with inks carrying single solid powder (e.g. silver, platinum, ceramic or glass powder). Challenging is printing of solid powder mixtures due to the differences in the aerodynamic properties of different powders. Those differences result in changes of the mixing ratio within the aerosol jet and therefore poor reproducibility in the final film properties is obtained. In this work, thick film resistors consisting of RuO2 with particle size < 1 μm as the conducting phase and different glass powders with particle size around 1 μm as the isolating phase were investigated. One glass had a density rather close to RuO2, the other glass significantly lower. Inks were made from RuO2/glass powder mixtures, a solvent and organic additives. After manufacturing the inks are printed on LTCC and the microstructures of the dried and the fired films were visualized by FIB preparation and SEM. The resistances as well as the temperature coefficients of the resistors were measured and compared to resistor films with an identical solid composition manufactured by conventional screen printing. The results of the obtained resistors are presented and discussed in terms of powder properties, ink dispersion and printing parameters.

Multimaterial bathless stereolithography using aerosol jet printing and UV laser based polymerization

2019 ◽  
Vol 31 (2) ◽  
pp. 022301 ◽  
Author(s):  
Arndt Hohnholz ◽  
Kotaro Obata ◽  
Daniel Albrecht ◽  
Jürgen Koch ◽  
Gerrit Hohenhoff ◽  
...  
Keyword(s):  
Uv Laser ◽  
Jet Printing ◽  
Aerosol Jet Printing

Hybrid UV laser direct writing of UV-curable PDMS thin film using aerosol jet printing

2019 ◽  
Vol 125 (2) ◽  
Author(s):  
Arndt Hohnholz ◽  
Kotaro Obata ◽  
Yasutaka Nakajima ◽  
Jürgen Koch ◽  
Mitsuhiro Terakawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Direct Writing ◽  
Uv Laser ◽  
Laser Direct Writing ◽  
Uv Curable ◽  
Jet Printing ◽  
Aerosol Jet Printing

Hybrid 2D patterning using UV laser direct writing and aerosol jet printing of UV curable polydimethylsiloxane

2017 ◽  
Vol 111 (12) ◽  
pp. 121903 ◽  
Author(s):  
Kotaro Obata ◽  
Adam Schonewille ◽  
Shayna Slobin ◽  
Arndt Hohnholz ◽  
Claudia Unger ◽  
...  
Keyword(s):  
Direct Writing ◽  
Uv Laser ◽  
Laser Direct Writing ◽  
Uv Curable ◽  
Jet Printing ◽  
Aerosol Jet Printing

Aerosol Jet Printing of Two Component Thick Film Resistors on LTCC

2013 ◽  
Vol 10 (3) ◽  
pp. 109-115 ◽  
Author(s):  
K. Swiecinski ◽  
M. Ihle ◽  
R. Jurk ◽  
E. Dietzen ◽  
U. Partsch ◽  
...  
Keyword(s):  
Particle Size ◽  
Thick Film ◽  
Glass Powder ◽  
New Technology ◽  
Organic Additives ◽  
Powder Mixtures ◽  
Conducting Phase ◽  
Aerodynamic Properties ◽  
Jet Printing ◽  
Aerosol Jet Printing

Aerosol jet printing is a rather new technology for the deposition of thick film structures offering high line and space resolution. This method offers high potential for miniaturization for thick film structures. The advantages of this technology could be shown with inks carrying a single solid powder (e.g., silver, platinum, ceramic, or glass powder). One of the challenges in printing solid powder mixtures is the differences in the aerodynamic properties of different powders. Those differences result in changes of the mixing ratio within the aerosol jet and therefore poor reproducibility in the finished film. In this work, thick film resistors consisting of RuO2 with particle size <1 μm as the conducting phase and different glass powders with particle size around 1 μm as the isolating phase were investigated. One glass had a density rather close to RuO2, the other glass significantly lower. Inks were made from RuO2/glass powder mixtures, a solvent, and organic additives. After manufacturing, the inks are printed on LTCC and the microstructures of the dried and the fired films were visualized by FIB preparation and SEM. The resistances as well as the temperature coefficients of the resistors were measured and compared with resistor films with an identical solid composition manufactured by conventional screen printing. The results of the obtained resistors are presented and discussed in terms of powder properties, ink dispersion, and printing parameters.

A Portable Fuel Cell System Using Activated Aluminum

2012 ◽  
Vol 132 (10) ◽  
pp. 997-1002 ◽  
Author(s):  
Koji Maekawa ◽  
Kenji Takahara ◽  
Toshinori Kajiwara
Keyword(s):  
Fuel Cell ◽  
Cell System ◽  
Fuel Cell System

Evaluation of Electric Load Following Capability on Fuel Cell System Fueled by High-Purity Hydrogen

2011 ◽  
Vol 131 (12) ◽  
pp. 927-935
Author(s):  
Yusuke Doi ◽  
Deaheum Park ◽  
Masayoshi Ishida ◽  
Akitoshi Fujisawa ◽  
Shinichi Miura
Keyword(s):  
Fuel Cell ◽  
High Purity ◽  
Cell System ◽  
Electric Load ◽  
Fuel Cell System ◽  
Load Following ◽  
High Purity Hydrogen
Sign in / Sign up

Export Citation Format

Share Document