High Resolution LTCC Laser Processing in the Green and Fired State for Future Technologies

2016 ◽  
Vol 2016 (CICMT) ◽  
pp. 000103-000106 ◽  
Author(s):  
Nam Gutzeit ◽  
Tilo Welker ◽  
Karl-Heinz Drüe ◽  
Jens Müller
Keyword(s):  
Laser Ablation ◽  
High Resolution ◽  
Laser Processing ◽  
Laser Scanning ◽  
Statistical Evaluation ◽  
Laser Scanning Microscopy ◽  
Process Chain ◽  
Uv Laser ◽  
Laser Structuring ◽  
Future Technologies

Abstract In this publication the results of laser structuring processes of LTCC substrates, screen printed and laser structured gold thick film lines and the processing procedures are presented. To investigate the compatibility of the laser processes into the conventional LTCC process chain the laser structuring was done in green as well as in fired state. Typical easy electrical patterns like miniaturized interdigital structures and meanders serve as examples of the reached resolution and geometrical borders of the laser structuring techniques at the Center of Micro- and Nanotechnologies of the TU Ilmenau (IMN Macro Nano®). The lateral precision and the topological shape are determined by laser scanning microscopy. The aimed structures have lines and spaces of 30 μm. A statistical evaluation is done to show the possibilities and the limits of the new laser structuring processes with picosecond UV laser ablation systems.

High-resolution differential thermography of integrated circuits with optical feedback laser scanning microscopy

2005 ◽  
Vol 87 (23) ◽  
pp. 231104 ◽  
Author(s):  
Carlo Mar Blanca ◽  
Vernon Julius Cemine ◽  
Vera Marie Sastine ◽  
Caesar Saloma
Keyword(s):  
High Resolution ◽  
Integrated Circuits ◽  
Laser Scanning ◽  
Optical Feedback ◽  
Laser Scanning Microscopy ◽  
Scanning Microscopy

Nanosecond and Femtosecond UV Laser Ablation of CdTe (100): Time-Of-Flight and Angular Distributions

1993 ◽  
Vol 334 ◽  
Author(s):  
P.D. Brewer ◽  
M. Späth ◽  
M. Stuke
Keyword(s):  
Laser Ablation ◽  
High Resolution ◽  
Mass Spectrometer ◽  
Multiphoton Ionization ◽  
Time Of Flight ◽  
Picosecond Laser ◽  
Laser Pulses ◽  
Dye Laser ◽  
Angular Distributions ◽  
Uv Laser

AbstractAngularly resolved time-of-flight (TOF) measurements have been used to probe the velocity and angular distributions of Cd atoms and Te2 molecules ejected from CdTe (100) substrates under irradiation by 248 nm nanosecond and sub-picosecond laser pulses. These experiments employ a dye laser TOF mass spectrometer with resonance enhanced multiphoton ionization for sensitive, high resolution detection of the desorbed products. The velocity distributions are well described by Maxwell-Boltzmann distributions for low fluence nanosecond (<60 mJ/cm2) and sub-picosecond (<3.3 mJ/cm2) pulses. Angular flux distributions for nanosecond irradiation are observed to be highly forward peaked about the surface normal, whereas, for sub-picosecond irradiation the distribution approaches cos3θ.

scholarly journals Reconstruction of Axial Tomographic High Resolution Data from Confocal Fluorescence Microscopy: A Method for Improving 3D FISH Images

2000 ◽  
Vol 20 (1) ◽  
pp. 7-15 ◽  
Author(s):  
R. Heintzmann ◽  
G. Kreth ◽  
C. Cremer
Keyword(s):  
High Resolution ◽  
Laser Scanning ◽  
Axial Direction ◽  
Laser Scanning Microscopy ◽  
Three Dimensions ◽  
Confocal Laser ◽  
Data Sets ◽  
Data Set ◽  
High Resolution Data ◽  
3D Data

Fluorescent confocal laser scanning microscopy allows an improved imaging of microscopic objects in three dimensions. However, the resolution along the axial direction is three times worse than the resolution in lateral directions. A method to overcome this axial limitation is tilting the object under the microscope, in a way that the direction of the optical axis points into different directions relative to the sample. A new technique for a simultaneous reconstruction from a number of such axial tomographic confocal data sets was developed and used for high resolution reconstruction of 3D‐data both from experimental and virtual microscopic data sets. The reconstructed images have a highly improved 3D resolution, which is comparable to the lateral resolution of a single deconvolved data set. Axial tomographic imaging in combination with simultaneous data reconstruction also opens the possibility for a more precise quantification of 3D data. The color images of this publication can be accessed from http://www.esacp.org/acp/2000/20‐1/heintzmann.htm. At this web address an interactive 3D viewer is additionally provided for browsing the 3D data. This java applet displays three orthogonal slices of the data set which are dynamically updated by user mouse clicks or keystrokes.

High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films

2007 ◽  
Vol 102 (9) ◽  
pp. 093102 ◽  
Author(s):  
Seung H. Ko ◽  
Heng Pan ◽  
David J. Hwang ◽  
Jaewon Chung ◽  
Sangil Ryu ◽  
...  
Keyword(s):  
Laser Ablation ◽  
High Resolution ◽  
Laser Processing ◽  
Metal Nanoparticle ◽  
Nanosecond Laser ◽  
Nanoparticle Films ◽  
Nanosecond Laser Ablation

scholarly journals In vivo high-resolution structural imaging of large arteries in small rodents using two-photon laser scanning microscopy

2010 ◽  
Vol 15 (1) ◽  
pp. 011108 ◽  
Author(s):  
Remco T. A. Megens ◽  
Sietze Reitsma ◽  
Lenneke Prinzen ◽  
Mirjam G. A. oude Egbrink ◽  
Wim Engels ◽  
...  
Keyword(s):  
High Resolution ◽  
Laser Scanning ◽  
Laser Scanning Microscopy ◽  
Scanning Microscopy ◽  
Structural Imaging ◽  
Small Rodents ◽  
Large Arteries ◽  
Two Photon
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