A Versatile Optical Head for 3D IC TSV Integration Process Control

2013 ◽  
Vol 2013 (DPC) ◽  
pp. 002015-002049
Author(s):  
G. Fresquet
Keyword(s):  
Near Infrared ◽  
Optical Measurement ◽  
Wafer Level ◽  
Large Area ◽  
3D Integration ◽  
Infrared Wavelength ◽  
Quantitative Measurements ◽  
Defects Inspection ◽  
Die Bonding ◽  
Miniaturized Systems

3D Integration of miniaturized systems at wafer level generates new needs of metrology and defects inspection for the control of TSV geometries, temporary wafer bonding, wafer thinning, via interconnects technology and of wafer/die stacks. In this paper we demonstrate the capabilities of a versatile optical measurement system combining several microscopy and interferometry techniques in the visible and near infrared wavelength range. I. INTRODUCTION AND BACKGROUND ALL roadmaps predict a large spread of 3D heterogeneous integration technologies for the fabrication of miniaturized systems in the coming years1. Beside a large development of new fabrication processes, 3D integration generates new challenges in terms of metrology and defects inspection for wafer/die bonding, thinning and interconnection processes as well as for 3D architectures. Adaptation and/or combination of existing techniques and the development of new techniques become necessary in order to perform non destructive, fast and inspections or quantitative measurements on large area wafers with high lateral and vertical resolutions. In this work we describe results obtained with an optical system combining several microscopy and interferometry techniques.

WLCSP Laminate Removal Using NIR Laser

2018 ◽  
Author(s):  
Chun Haur Khoo
Keyword(s):  
Near Infrared ◽  
Laser Energy ◽  
Photon Emission ◽  
Mechanical Damage ◽  
Consumer Products ◽  
Fault Isolation ◽  
Wafer Level ◽  
Isolation Technique ◽  
Laminate Layer ◽  
Nir Laser

Abstract Driven by the cost reduction and miniaturization, Wafer Level Chip Scale Packaging (WLCSP) has experienced significant growth mainly driven by mobile consumer products. Depending on the customers or manufacturing needs, the bare silicon backside of the WLCSP may be covered with a backside laminate layer. In the failure analysis lab, in order to perform the die level backside fault isolation technique using Photon Emission Microscope (PEM) or Laser Signal Injection Microscope (LSIM), the backside laminate layer needs to be removed. Most of the time, this is done using the mechanical polishing method. This paper outlines the backside laminate removal method of WLCSP using a near infrared (NIR) laser that produces laser energy in the 1,064 nm range. This method significantly reduces the sample preparation time and also reduces the risk of mechanical damage as there is no application of mechanical force. This is an effective method for WLCSP mounted on a PCB board.

scholarly journals Stripping of the Positive-tone Diazonaphthoquinone / Novolak Resist using Laser Irradiation from Visible to Near Infrared Wavelength

2012 ◽  
Vol 25 (6) ◽  
pp. 741-746 ◽  
Author(s):  
Tomosumi Kamimura ◽  
Hiroki Muraoka ◽  
Yuki Yamana ◽  
Yoshiaki Matsura ◽  
Hideo Horibe
Keyword(s):  
Laser Irradiation ◽  
Near Infrared ◽  
Infrared Wavelength

Hybridization-sensitive fluorescence control in the near-infrared wavelength range

2011 ◽  
Vol 9 (11) ◽  
pp. 4199 ◽  
Author(s):  
Shuji Ikeda ◽  
Hiroyuki Yanagisawa ◽  
Akiko Nakamura ◽  
Dan Ohtan Wang ◽  
Mizue Yuki ◽  
...  
Keyword(s):  
Wavelength Range ◽  
Near Infrared ◽  
Infrared Wavelength

Growth and Properties of Pulsed Laser Deposited K3Li2Nb5O15 Thin Films

2007 ◽  
Vol 351 ◽  
pp. 184-188 ◽  
Author(s):  
Zu Sheng Zhan ◽  
Yan Sheng Gong ◽  
Qiang Shen ◽  
Lian Meng Zhang
Keyword(s):  
Near Infrared ◽  
Ambient Pressure ◽  
Tungsten Bronze ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Optical Studies ◽  
Tetragonal Tungsten Bronze ◽  
Infrared Wavelength ◽  
Optimum Parameters ◽  
Substrate Temperatures

Potassium lithium niobate (KLN: K3Li2Nb5O15) films have been deposited on quartz glass by Pulsed laser deposition (PLD) technique using a stoichiometric KLN target as starting materials. By investigating the effects of both the oxygen pressure and the substrate temperature on the structure of KLN films, optimum parameters have been identified for the growth of high-quality KLN films. At 10Pa oxygen ambient pressure, tetragonal tungsten-bronze-type structure of KLN films with (310) preferred orientation can be achieved at substrate temperatures in the range of 700-800°C. Optical studies indicate that the films are highly transparent in the visible-near-infrared wavelength range.

scholarly journals Multi-layered tissue head phantoms for noninvasive optical diagnostics

2015 ◽  
Vol 08 (03) ◽  
pp. 1541005 ◽  
Author(s):  
M. S. Wróbel ◽  
A. P. Popov ◽  
A. V. Bykov ◽  
M. Kinnunen ◽  
M. Jędrzejewska-Szczerska ◽  
...  
Keyword(s):  
Optical Properties ◽  
Near Infrared ◽  
Optical Measurement ◽  
Human Head ◽  
Medical Diagnostics ◽  
Optical Parameters ◽  
Measurement Systems ◽  
Tissue Phantoms ◽  
Optical And Mechanical Properties

Extensive research in the area of optical sensing for medical diagnostics requires development of tissue phantoms with optical properties similar to those of living human tissues. Development and improvement of in vivo optical measurement systems requires the use of stable tissue phantoms with known characteristics, which are mainly used for calibration of such systems and testing their performance over time. Optical and mechanical properties of phantoms depend on their purpose. Nevertheless, they must accurately simulate specific tissues they are supposed to mimic. Many tissues and organs including head possess a multi-layered structure, with specific optical properties of each layer. However, such a structure is not always addressed in the present-day phantoms. In this paper, we focus on the development of a plain-parallel multi-layered phantom with optical properties (reduced scattering coefficient [Formula: see text] and absorption coefficient μa) corresponding to the human head layers, such as skin, skull, and gray and white matter of the brain tissue. The phantom is intended for use in noninvasive diffuse near-infrared spectroscopy (NIRS) of human brain. Optical parameters of the fabricated phantoms are reconstructed using spectrophotometry and inverse adding-doubling calculation method. The results show that polyvinyl chloride-plastisol (PVCP) and zinc oxide ( ZnO ) nanoparticles are suitable materials for fabrication of tissue mimicking phantoms with controlled scattering properties. Good matching was found between optical properties of phantoms and the corresponding values found in the literature.

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