Investigating the Wafer Temperature in an Atmospheric-Pressure Plasma Process

Gi-Chung Kwon; Woo Jae Kim; Tae Hyun Lee; Hwan Hee Lee; Hee Tae Kwon; Gi Won Shin

doi:10.3938/jkps.77.477

Investigating the Wafer Temperature in an Atmospheric-Pressure Plasma Process

Journal of the Korean Physical Society ◽

10.3938/jkps.77.477 ◽

2020 ◽

Vol 77 (6) ◽

pp. 477-481

Author(s):

Gi-Chung Kwon ◽

Woo Jae Kim ◽

Tae Hyun Lee ◽

Hwan Hee Lee ◽

Hee Tae Kwon ◽

...

Keyword(s):

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Wafer Temperature ◽

Pressure Plasma

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Study on the Improvement of Hydrogen Generation Efficiency by Atmospheric Pressure Plasma Process

Journal of the Korean Institute of Illuminating and Electrical Installation Engineers ◽

10.5207/jieie.2016.30.12.026 ◽

2016 ◽

Vol 30 (12) ◽

pp. 26

Author(s):

SangBo Han

Keyword(s):

Atmospheric Pressure ◽

Hydrogen Generation ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Generation Efficiency ◽

Pressure Plasma

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Monodisperse Nanoparticle Synthesis by an Atmospheric Pressure Plasma Process: An Example of a Visible Light Photocatalyst

Industrial & Engineering Chemistry Research ◽

10.1021/ie049815x ◽

2004 ◽

Vol 43 (22) ◽

pp. 7200-7203 ◽

Cited By ~ 11

Author(s):

Hsunling Bai ◽

Chienchih Chen ◽

Chiahsin Lin ◽

Walter Den ◽

Chungliang Chang

Keyword(s):

Visible Light ◽

Atmospheric Pressure ◽

Nanoparticle Synthesis ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Visible Light Photocatalyst ◽

Pressure Plasma

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Preparation of antibacterial non-woven fabric via atmospheric pressure plasma process

2015 IEEE International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.2015.7179955 ◽

2015 ◽

Cited By ~ 2

Author(s):

Xiaolong Denga ◽

Anton Nikiforova ◽

Christophe Leys ◽

Danijela Vujosevicb ◽

Vineta Vuksanovic

Keyword(s):

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Woven Fabric ◽

Plasma Process ◽

Pressure Plasma

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Preparation of N-doped TiO2 photocatalyst by atmospheric pressure plasma process for VOCs decomposition under UV and visible light sources

Journal of Nanoparticle Research ◽

10.1007/s11051-006-9141-2 ◽

2006 ◽

Vol 9 (3) ◽

pp. 365-375 ◽

Cited By ~ 53

Author(s):

Chienchih Chen ◽

Hsunling Bai ◽

Sue-min Chang ◽

Chungliang Chang ◽

Walter Den

Keyword(s):

Visible Light ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Light Sources ◽

Tio2 Photocatalyst ◽

Plasma Process ◽

Doped Tio2 ◽

Pressure Plasma ◽

Vocs Decomposition

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Rapid and selective surface functionalization of the membrane for high efficiency oil-water separation via an atmospheric pressure plasma process

Scientific Reports ◽

10.1038/s41598-017-15713-x ◽

2017 ◽

Vol 7 (1) ◽

Cited By ~ 8

Author(s):

Yong Sung You ◽

Seongchan Kang ◽

Rodolphe Mauchauffé ◽

Se Youn Moon

Keyword(s):

Surface Functionalization ◽

Atmospheric Pressure ◽

High Efficiency ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Water Separation ◽

Pressure Plasma ◽

Oil Water Separation ◽

Oil Water

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Super-hydrophobic film deposition by an atmospheric-pressure plasma process and its anti-icing characteristics

Plasma Science and Technology ◽

10.1088/2058-6272/ab01f4 ◽

2019 ◽

Vol 21 (5) ◽

pp. 055502 ◽

Cited By ~ 2

Author(s):

Qinghua HUANG ◽

Lin XIONG ◽

Xiaolong DENG ◽

Zhan SHU ◽

Qiang CHEN ◽

...

Keyword(s):

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Film Deposition ◽

Plasma Process ◽

Pressure Plasma

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An Atmospheric-Pressure Plasma Process for C2F6Removal

Environmental Science & Technology ◽

10.1021/es001556p ◽

2001 ◽

Vol 35 (8) ◽

pp. 1587-1592 ◽

Cited By ~ 39

Author(s):

Moo Been Chang ◽

Sheng Jen Yu

Keyword(s):

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Pressure Plasma

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Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2009.08.005 ◽

2009 ◽

Vol 12 (3) ◽

pp. 106-112 ◽

Cited By ~ 3

Author(s):

Toshiyuki Hamada ◽

Tatsuya Sakoda ◽

Masahisa Otsubo

Keyword(s):

Solar Cells ◽

Silicon Nitride ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Silicon Solar Cells ◽

Process Conditions ◽

Plasma Process ◽

Pressure Plasma

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Deposition of a stable and high concentration of carboxylic acid functional groups onto a silicon surface via a tailored remote atmospheric pressure plasma process

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2017.09.057 ◽

2018 ◽

Vol 336 ◽

pp. 67-71 ◽

Cited By ~ 8

Author(s):

Wei-Yu Chen ◽

Allan Matthews ◽

Frank R. Jones ◽

Ko-Shao Chen

Keyword(s):

Carboxylic Acid ◽

Functional Groups ◽

Atmospheric Pressure ◽

Silicon Surface ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

High Concentration ◽

Pressure Plasma

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Influence of atmospheric pressure plasma process parameters on the mechanical behavior of thermoplastic joints

International Journal of Adhesion and Adhesives ◽

10.1016/j.ijadhadh.2020.102650 ◽

2020 ◽

Vol 102 ◽

pp. 102650

Author(s):

F. Moroni ◽

F. Musiari ◽

C. Sciancalepore ◽

M. Messori

Keyword(s):

Mechanical Behavior ◽

Process Parameters ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Process ◽

Pressure Plasma

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