Effects of gas flow rate on the etch characteristics of a low-k sicoh film with an amorphous carbon mask in dual-frequency CF4/C4F8/Ar capacitively-coupled plasmas

2013 ◽  
Vol 62 (1) ◽  
pp. 67-72 ◽  
Author(s):  
Bong-Soo Kwon ◽  
Hea-Lim Lee ◽  
Nae-Eung Lee ◽  
Chang-Young Kim ◽  
Chi Kyu Choi
Keyword(s):  
Amorphous Carbon ◽  
Flow Rate ◽  
Gas Flow ◽  
Dual Frequency ◽  
Gas Flow Rate ◽  
Capacitively Coupled ◽  
Coupled Plasmas ◽  
Low K

Effects of ethylene gas flow rate on optoelectrical properties of nitrogenated thin amorphous carbon films grown by microwave surface wave plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1724-1727 ◽  
Author(s):  
Dilip C. Ghimire ◽  
S. Adhikari ◽  
H.R. Aryal ◽  
S.M. Mominuzzamn ◽  
T. Soga ◽  
...  
Keyword(s):  
Surface Wave ◽  
Amorphous Carbon ◽  
Flow Rate ◽  
Gas Flow ◽  
Carbon Films ◽  
Gas Flow Rate ◽  
Plasma Cvd ◽  
Amorphous Carbon Films

Infuence of Nitrogen Gas Flow Rate on Nitrogenated Amorphous Carbon Film for Solar Cell Applications

2015 ◽  
Vol 1109 ◽  
pp. 138-142
Author(s):  
A. Ishak ◽  
Mohd Firdaus Malek ◽  
Mohamad Hafiz Mamat ◽  
Mohamad Rusop
Keyword(s):  
Solar Cell ◽  
Amorphous Carbon ◽  
Flow Rate ◽  
Gas Flow ◽  
Carbon Film ◽  
Deposition Condition ◽  
Gas Flow Rate ◽  
Nitrogen Gas ◽  
Amorphous Carbon Film ◽  
Nitrogen Doped

In this paper, the effect of nitrogen gas flow rate on electrical and electronic properties of nitrogen doped amorphous carbon film (a-C:N) by the use of constant +50 V is presented. The flow-rate of nitrogen gas into the furnace was influenced the resistivity as well as conductivity a-C:N film. The resistivity and conductivity of a-C:N films deposited at high nitrogen flow-rate (200 mL/min) produced low resistivity and high conductivity under deposition condition used. The highest resistivity (4.97x107 Ω.cm) and lowest resistivity (2.81x101 Ω.cm) is found at 0 mL/min (undoped) and 200 mL/min. The fabricated solar cell device with the configuration of Au/n-C:N/p-Si/Au for undoped (0 mL/min) and nitrogen doped (200 mL/min) achieved efficiency (𝜂) 0.00111% and 0.00120 %, respectively.

Effect of Gas Flow Rate on the Properties of Amorphous Carbon Thin Films Prepared by Thermal CVD Using Camphoric Carbon Precursor

2013 ◽  
Vol 832 ◽  
pp. 423-428
Author(s):  
K. Dayana ◽  
A.N. Fadzilah ◽  
A. Ishak ◽  
Yosri M. Siran ◽  
Syahril Anuar M. Rejab ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Flow Rate ◽  
Gas Flow ◽  
Nir Spectroscopy ◽  
Gas Flow Rate ◽  
Argon Gas ◽  
Thermal Cvd ◽  
Current Voltage ◽  
Amorphous Structures

Amorphous carbon (a-C) thin films have been prepared by a simple thermal CVD using camphor oil as precursor. The effects of argon gas flow rate on electrical, optical and structural properties of a-C thin films have been investigated. The a-C thin films were characterized by using current-voltage (I-V) measurement, UV-Vis-NIR spectroscopy, Raman and FTIR spectroscopy. The I-V study reveals that the electrical conductivity was increased with increasing argon gas flow rate. It was found that the optical band gap decreased from 0.88 to 0.42 eV as gas flow rate increased which indicates a microstructural disorder at different gas flow rate. Raman and FTIR studies reveal the amorphous structures which consist of a mixture of sp2 and sp3 bonded carbon atoms.

SCIENTIFIC AND ENGINEERING PRINCIPLES OF EFFICIENT FUEL USE AND ENVIRONMENTALLY FRIENDLY GAS COMBUSTION IN STOVE PLATES. PART 1. MODERN STATE-OF-THE-ART AND DIRECTIONS FOR IMPROVEMENT THE GAS BURNING IN DOMESTIC GAS COOKERS

2017 ◽  
pp. 3-18 ◽  
Author(s):  
B.S. Soroka ◽  
V.V. Horupa
Keyword(s):  
Natural Gas ◽  
Flow Rate ◽  
Gas Flow ◽  
Renewable Energy Sources ◽  
Combustion Process ◽  
Orifice Diameter ◽  
Firing Process ◽  
Gas Flow Rate ◽  
Gas Combustion ◽  
Gas Stoves

Natural gas NG consumption in industry and energy of Ukraine, in recent years falls down as a result of the crisis in the country’s economy, to a certain extent due to the introduction of renewable energy sources along with alternative technologies, while in the utility sector the consumption of fuel gas flow rate enhancing because of an increase the number of consumers. The natural gas is mostly using by domestic purpose for heating of premises and for cooking. These items of the gas utilization in Ukraine are already exceeding the NG consumption in industry. Cooking is proceeding directly in the living quarters, those usually do not meet the requirements of the Ukrainian norms DBN for the ventilation procedures. NG use in household gas stoves is of great importance from the standpoint of controlling the emissions of harmful components of combustion products along with maintenance the satisfactory energy efficiency characteristics of NG using. The main environment pollutants when burning the natural gas in gas stoves are including the nitrogen oxides NOx (to a greater extent — highly toxic NO2 component), carbon oxide CO, formaldehyde CH2O as well as hydrocarbons (unburned UHC and polyaromatic PAH). An overview of environmental documents to control CO and NOx emissions in comparison with the proper norms by USA, EU, Russian Federation, Australia and China, has been completed. The modern designs of the burners for gas stoves are considered along with defining the main characteristics: heat power, the natural gas flow rate, diameter of gas orifice, diameter and spacing the firing openings and other parameters. The modern physical and chemical principles of gas combustion by means of atmospheric ejection burners of gas cookers have been analyzed from the standpoints of combustion process stabilization and of ensuring the stability of flares. Among the factors of the firing process destabilization within the framework of analysis above mentioned, the following forms of unstable combustion/flame unstabilities have been considered: flashback, blow out or flame lifting, and the appearance of flame yellow tips. Bibl. 37, Fig. 11, Tab. 7.

On the Influence of Fluctuating Flow Rate Upon the Performance and Behaviour of Isothermal Reacting Systems

1998 ◽  
Vol 63 (6) ◽  
pp. 881-898
Author(s):  
Otakar Trnka ◽  
Miloslav Hartman
Keyword(s):  
Flow Rate ◽  
Gas Flow ◽  
Fluidized Bed Reactor ◽  
Computational Techniques ◽  
Continuous Stirred Tank Reactor ◽  
Gas Flow Rate ◽  
Solid Reaction ◽  
Continuous Stirred Tank ◽  
And Performance ◽  
Reacting Systems

Three simple computational techniques are proposed and employed to demonstrate the effect of fluctuating flow rate of feed on the behaviour and performance of an isothermal, continuous stirred tank reactor (CSTR). A fluidized bed reactor (FBR), in which a non-catalytic gas-solid reaction occurs, is also considered. The influence of amplitude and frequency of gas flow rate fluctuations on reactant concentrations at the exit of the CSTR is shown in four different situations.

scholarly journals Investigation on influences of loose gas on gas-solid flows in a circulating fluidized bed (CFB) reactor using full-loop numerical simulation

2020 ◽  
Vol 0 (0) ◽  
Author(s):  
Pengju Huo ◽  
Xiaohong Li ◽  
Yang Liu ◽  
Haiying Qi
Keyword(s):  
Numerical Simulation ◽  
Flow Rate ◽  
Gas Flow ◽  
Circulating Fluidized Bed ◽  
Separation Efficiency ◽  
Circulation Rate ◽  
Solid Mass ◽  
Gas Flow Rate ◽  
Gas Leakage ◽  
Mass Circulation

AbstractThe influences of loose gas on gas-solid flows in a large-scale circulating fluidized bed (CFB) gasification reactor were investigated using full-loop numerical simulation. The two-fluid model was coupled with the QC-energy minimization in multi-scale theory (EMMS) gas-solid drag model to simulate the fluidization in the CFB reactor. Effects of the loose gas flow rate, Q, on the solid mass circulation rate and the cyclone separation efficiency were analyzed. The study found different effects depending on Q: First, the particles in the loop seal and the standpipe tended to become more densely packed with decreasing loose gas flow rate, leading to the reduction in the overall circulation rate. The minimum Q that can affect the solid mass circulation rate is about 2.5% of the fluidized gas flow rate. Second, the sealing gas capability of the particles is enhanced as the loose gas flow rate decreases, which reduces the gas leakage into the cyclones and improves their separation efficiency. The best loose gas flow rates are equal to 2.5% of the fluidized gas flow rate at the various supply positions. In addition, the cyclone separation efficiency is correlated with the gas leakage to predict the separation efficiency during industrial operation.

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