Static characteristics of radial-thrust aerostatic bearing on ultra-precision machine tool

2012 ◽  
Vol 20 (3) ◽  
pp. 607-615
Author(s):  
张飞虎 ZHANG Fei-hu ◽  
付鹏强 FU Peng-qiang ◽  
汪圣飞 WANG Sheng-fei ◽  
张强 ZHANG Qiang
Keyword(s):  
Machine Tool ◽  
Static Characteristics ◽  
Aerostatic Bearing ◽  
Precision Machine ◽  
Ultra Precision ◽  
Radial Thrust

Influence of Diameter and Number of Orifice on Static Characteristics of Radial-Thrust Aerostatic Bearing

2012 ◽  
Vol 497 ◽  
pp. 78-82
Author(s):  
Fei Hu Zhang ◽  
Sheng Fei Wang ◽  
Qiang Zhang ◽  
Peng Qiang Fu
Keyword(s):  
Machine Tool ◽  
Fluid Dynamic ◽  
Load Capacity ◽  
Large Diameter ◽  
Orifice Diameter ◽  
Static Characteristics ◽  
Aerostatic Bearing ◽  
Supporting System ◽  
Manufacturing Technologies ◽  
Radial Thrust

The working performance of the spindle system is the most important factor to embody the overall performance of the machine tool. To ensure the advanced capabilities, besides the high-precision manufacturing technologies, it is mainly depending on the bearing module and the forces on the spindle. In this paper, a new strategy of the vertical spindle supporting system is presented to meet the high stiffness requirement for the aerostatic bearing. Based on the computational fluid dynamics and finite volume method, a fluid dynamic model and structure model of the large diameter incorporate radial-thrust aerostatic bearing is developed and simulated to find out the pressure distribution laws of the spindle supporting system. The grid subdivision in the direction of film thickness is paid more attentions when establishing the grid of the whole gas film. Simulation results show that this special structure of bearing module can supply enough load capacity and stiffness for the machine tool. The results also indicate that the static characteristics of the bearing are improved as the supply pressure increases and as the supply orifice diameter decreases.

scholarly journals Dynamic Accuracy Design Method of Ultra-precision Machine Tool

2018 ◽  
Vol 31 (1) ◽  
Author(s):  
Guo-Da Chen ◽  
Ya-Zhou Sun ◽  
Fei-Hu Zhang ◽  
Li-Hua Lu ◽  
Wan-Qun Chen ◽  
...  
Keyword(s):  
Machine Tool ◽  
Design Method ◽  
Dynamic Accuracy ◽  
Precision Machine ◽  
Ultra Precision

On-Machine Metrology System Using Confocal Chromatic Probe and Motion Error Correction for Ultra-Precision Machine Tool

2020 ◽  
Author(s):  
Hao Duan ◽  
Shinya Morita ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Yutaka Yamagata
Keyword(s):  
Machine Tool ◽  
Free Form ◽  
Reference Curve ◽  
Optical Surface ◽  
Motion Error ◽  
Precision Machine ◽  
Ultra Precision ◽  
Axis Position ◽  
Form Deviation ◽  
Accuracy And Repeatability

Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations. This waviness lowers the quality of the optical surface. To address this problem, we use the waviness of the axial displacement of the ultra-precision machine tool. The waviness is obtained by a non-contact on-machine metrology (OMM) system that measures an optical flat as a correction reference curve, which is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation of the workpiece with 1 nm resolution. The axis position capture system uses a signal branch circuit of linear scale on each axis from the ultra-precision machine tool. The OMM system is tested in terms of accuracy and repeatability. In comparison to the results of the shaper cutting of an oxygen-free copper (OFC) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness.

Quadrant Protrusion Measurement of Ultra-Precision Machine Tool by Real-Time Position Capturing Method

2016 ◽  
Vol 874 ◽  
pp. 531-536 ◽  
Author(s):  
Hao Duan ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Shinya MORITA ◽  
Yutaka Yamagata
Keyword(s):  
Machine Tool ◽  
Real Time ◽  
Data Storage ◽  
Optical Element ◽  
Linear Interpolation ◽  
Precision Machine ◽  
Control Code ◽  
Ultra Precision ◽  
Time Position ◽  
Circular Interpolation

This paper describes a development of a real-time position capturing method in which branched encoder signals are recorded in external data storage, to evaluate motion trajectories of the XYZ table on ultra-precision machine tool. The method allows the capturing with minimal modification to the machine: without any additional sensors. In the previous study we generated a non-axisymmetric aspherical optical element by XZC-axis simultaneous numerical controlled ultra-precision turning process with 2 μm form deviation, the reason of form accuracy degradation wasn’t identified. Using the developed system, motion accuracy of ultra-precision machine tool is confirmed. The machine tool moves along circular trajectory in three coordinate planes (XY, YZ and ZX) respectively. The rotation direction of circle is set clock wise and counter clock wise. The circle processing interpolation command by linear interpolation control code and circular interpolation control code. The results showed the effectiveness of the proposed method for performance evaluations of machine tools, by revealing the influence of trajectory parameters on the magnitudes of quadrant protrusions.

An expert system for hydro/aero-static spindle design used in ultra precision machine tool

2014 ◽  
Vol 30 (2) ◽  
pp. 107-113 ◽  
Author(s):  
Yingchun Liang ◽  
Wanqun Chen ◽  
Yazhou Sun ◽  
Nan Yu ◽  
Peng Zhang ◽  
...  
Keyword(s):  
Expert System ◽  
Machine Tool ◽  
Precision Machine ◽  
Ultra Precision
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