Optical readout method based on time-discrete modulation for micro-cantilever array sensing

2016 ◽  
Vol 14 (10) ◽  
pp. 101102-101106
Author(s):  
Xuhong Chu Xuhong Chu ◽  
Liquan Dong Liquan Dong ◽  
Yuejin Zhao Yuejin Zhao ◽  
Xiaomei Yu Xiaomei Yu ◽  
and Yun Feng and Yun Feng
Keyword(s):  
Optical Readout ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Array Sensing

scholarly journals Optical-readout micro-cantilever array IR imaging system and performance analysis

2007 ◽  
Vol 56 (5) ◽  
pp. 2529
Author(s):  
Xiong Zhi_Ming ◽  
Zhang Qing_Chuan ◽  
Chen Da_Peng ◽  
Wu Xiao_Ping ◽  
Guo Zhe_Ying ◽  
...  
Keyword(s):  
Performance Analysis ◽  
Imaging System ◽  
Optical Readout ◽  
Ir Imaging ◽  
Cantilever Array ◽  
And Performance ◽  
Micro Cantilever

Modeling, Identification and Control of a Micro-cantilever Array

2013 ◽  
pp. 149-196
Author(s):  
Scott Cogan ◽  
Hui Hui ◽  
Michel Lenczner ◽  
Emmanuel Pillet ◽  
Nicolas Rattier ◽  
...  
Keyword(s):  
Cantilever Array ◽  
Micro Cantilever ◽  
And Control

Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

2008 ◽  
Vol 108 (6) ◽  
pp. 579-588 ◽  
Author(s):  
Fengliang Dong ◽  
Qingchuan Zhang ◽  
Dapeng Chen ◽  
Zhengyu Miao ◽  
Zhiming Xiong ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Imaging Device ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

Pixels array matching for optical readout microcantilever array sensing system

Optik ◽  
2013 ◽  
Vol 124 (23) ◽  
pp. 6058-6062
Author(s):  
Cheng Gong ◽  
Yuejin Zhao ◽  
Liquan Dong ◽  
Mei Hui ◽  
Xiaomei Yu
Keyword(s):  
Sensing System ◽  
Optical Readout ◽  
Array Sensing ◽  
Microcantilever Array

Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

2007 ◽  
Vol 24 (12) ◽  
pp. 3362-3364 ◽  
Author(s):  
Dong Feng-Liang ◽  
Zhang Qing-Chuan ◽  
Chen Da-Peng ◽  
Miao Zheng-Yu ◽  
Xiong Zhi-Ming ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

Cantilever array oscillators with nonlinear optical readout

2015 ◽  
Author(s):  
Sevil Zeynep Lulec ◽  
Ulas Adiyan ◽  
Goksen G. Yaralioglu ◽  
Yusuf Leblebici ◽  
Hakan Urey
Keyword(s):  
Nonlinear Optical ◽  
Optical Readout ◽  
Cantilever Array

A Bulk Micromachined Cantilever Array for Uncooled Infrared Imaging

2008 ◽  
Author(s):  
Yuliang Yi ◽  
Shenglin Ma ◽  
Xiaomei Yu ◽  
Ming Liu ◽  
Xiaohua Liu
Keyword(s):  
Infrared Imaging ◽  
Sacrificial Layer ◽  
Ir Radiation ◽  
Deep Reactive Ion Etching ◽  
Optical Readout ◽  
Layer Technique ◽  
Cantilever Array ◽  
Noise Equivalent Temperature Difference ◽  
The One ◽  
Uncooled Infrared Imaging

This paper presents a bi-material microcantilever focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA was fabricated by a bulk silicon micromachining method with substrate silicon selectively removed by deep reactive ion etching (DRIE) technique at the area where each cantilever pixel is located. The absorbance of the IR radiation can be improved by 48% due to the selective removal of the substrate, and hence the noise equivalent temperature difference (NETD) of the FPA can be reduced by 32% compared to the one fabricated by sacrificial layer technique, approaching 60mK. The thermomechanical sensitivity and the response time of the FPA were measured and calculated to be 112nm/K and 15ms, respectively. An image of human bodies was captured by an optical readout method.

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