An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition

doi:10.3745/kipstd.2004.11d.3.709

An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition

The KIPS Transactions PartD ◽

10.3745/kipstd.2004.11d.3.709 ◽

2004 ◽

Vol 11D (3) ◽

pp. 709-716

Keyword(s):

Time Series ◽

Pattern Recognition ◽

Monitoring System ◽

Multiple Time ◽

Multiple Time Series ◽

Semiconductor Processing ◽

Intelligent Monitoring ◽

Processing Equipment

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INSTALLING ENERGY MONITORING SYSTEM FOR CONSUMER SECTOR IN INDONESIA AND ENERGY USE PREDICTION BY MULTIPLE-TIME SERIES MODELLING

Journal of Japan Society of Civil Engineers Ser G (Environmental Research) ◽

10.2208/jscejer.73.ii_35 ◽

2017 ◽

Vol 73 (6) ◽

pp. II_35-II_43 ◽

Cited By ~ 1

Author(s):

Seiya MAKI ◽

Shuichi ASHINA ◽

Minoru FUJII ◽

Kenji UCHIDA ◽

Kengo AIZAWA ◽

...

Keyword(s):

Time Series ◽

Monitoring System ◽

Energy Use ◽

Multiple Time ◽

Multiple Time Series ◽

Energy Monitoring ◽

Time Series Modelling ◽

Energy Use Prediction

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ENERGY USE PREDICTION BY MULTIPLE-TIME SERIES AND STATE VARIABLE MODELLING BASED ON ENERGY MONITORING SYSTEM FOR INDUSTRIAL FACILITY IN INDONESIA

Journal of Japan Society of Civil Engineers Ser G (Environmental Research) ◽

10.2208/jscejer.74.ii_73 ◽

2018 ◽

Vol 74 (6) ◽

pp. II_73-II_83

Author(s):

Seiya MAKI ◽

Minoru FUJII ◽

Tsuyoshi FUJITA ◽

Yasushi SHIRAISHI ◽

Shuichi ASHINA

Keyword(s):

Time Series ◽

Monitoring System ◽

Energy Use ◽

Multiple Time ◽

Multiple Time Series ◽

Industrial Facility ◽

Energy Monitoring ◽

State Variable ◽

Energy Use Prediction

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Improving Multiple Time Series Forecasting with Data Stream Mining Algorithms

2020 IEEE International Conference on Systems, Man, and Cybernetics (SMC) ◽

10.1109/smc42975.2020.9283059 ◽

2020 ◽

Author(s):

Marcos Alberto Mochinski ◽

Jean Paul Barddal ◽

Fabricio Enembreck

Keyword(s):

Time Series ◽

Data Stream ◽

Time Series Forecasting ◽

Data Stream Mining ◽

Multiple Time ◽

Multiple Time Series ◽

Stream Mining ◽

Mining Algorithms

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On Divergence and Dissimilarity Measures for Multiple Time Series

Applied Modeling Techniques and Data Analysis 1 ◽

10.1002/9781119821588.ch14 ◽

2021 ◽

pp. 249-260

Author(s):

Konstantinos Makris ◽

Alex Karagrigoriou ◽

Ilia Vonta

Keyword(s):

Time Series ◽

Multiple Time ◽

Multiple Time Series ◽

Dissimilarity Measures

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A 3D Visualization of Multiple Time Series on Maps

2010 14th International Conference Information Visualisation ◽

10.1109/iv.2010.54 ◽

2010 ◽

Cited By ~ 12

Author(s):

Sidharth Thakur ◽

Andrew J. Hanson

Keyword(s):

Time Series ◽

3D Visualization ◽

Multiple Time ◽

Multiple Time Series

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A multiple time series-based recurrent neural network for short-term load forecasting

Soft Computing ◽

10.1007/s00500-017-2624-5 ◽

2017 ◽

Vol 22 (12) ◽

pp. 4099-4112 ◽

Cited By ~ 14

Author(s):

Bing Zhang ◽

Jhen-Long Wu ◽

Pei-Chann Chang

Keyword(s):

Neural Network ◽

Time Series ◽

Recurrent Neural Network ◽

Load Forecasting ◽

Multiple Time ◽

Multiple Time Series ◽

Short Term ◽

Short Term Load Forecasting

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Modern (Multiple) Time Series Models: The Dynamic System

International Series in Quantitative Marketing - Advanced Methods for Modeling Markets ◽

10.1007/978-3-319-53469-5_4 ◽

2017 ◽

pp. 115-148 ◽

Cited By ~ 1

Author(s):

Koen H. Pauwels

Keyword(s):

Time Series ◽

Dynamic System ◽

Time Series Models ◽

Multiple Time ◽

Multiple Time Series

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An Introduction to Multiple Time Series Analysis

Medical Care ◽

10.1097/00005650-199305001-00011 ◽

1993 ◽

Vol 31 (supplement) ◽

pp. YS71-YS74

Author(s):

G. C. TlAO

Keyword(s):

Time Series ◽

Time Series Analysis ◽

Multiple Time ◽

Multiple Time Series ◽

Series Analysis

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Canonical correlation and reduction of multiple time series

Annals of the Institute of Statistical Mathematics ◽

10.1007/bf00773471 ◽

1994 ◽

Vol 46 (4) ◽

pp. 625-631

Author(s):

Mohsen Pourahmadi

Keyword(s):

Time Series ◽

Canonical Correlation ◽

Multiple Time ◽

Multiple Time Series

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Inferring pairwise regulatory relationships from multiple time series datasets

Bioinformatics ◽

10.1093/bioinformatics/btl676 ◽

2007 ◽

Vol 23 (6) ◽

pp. 755-763 ◽

Cited By ~ 21

Author(s):

Y. Shi ◽

T. Mitchell ◽

Z. Bar-Joseph

Keyword(s):

Time Series ◽

Multiple Time ◽

Multiple Time Series

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