Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

10.3403/02222256u ◽

2015 ◽

Keyword(s):

Chemical Analysis ◽

Silicon Wafers ◽

Total Reflection ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis ◽

Analysis Determination

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Summary of ISO/TC 201 Standard: VI ISO 14706:2000?Surface chemical analysis?Determination of surface elemental contamination on silicon wafers by total reflection x-ray fluorescence (TXRF) spectroscopy

Surface and Interface Analysis ◽

10.1002/sia.1194 ◽

2002 ◽

Vol 33 (4) ◽

pp. 369-370 ◽

Cited By ~ 5

Author(s):

Yohichi Gohshi

Keyword(s):

Chemical Analysis ◽

Silicon Wafers ◽

Total Reflection ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis ◽

Analysis Determination

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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

10.3403/02222256 ◽

2001 ◽

Keyword(s):

Chemical Analysis ◽

Silicon Wafers ◽

Total Reflection ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis ◽

Analysis Determination

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Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)

Surface and Interface Analysis ◽

10.1002/sia.7025 ◽

2021 ◽

Author(s):

Wolfgang E. S. Unger ◽

Mathias Senoner ◽

Jörg M. Stockmann ◽

Vincent Fernandez ◽

Neal Fairley ◽

...

Keyword(s):

Chemical Analysis ◽

Lateral Resolution ◽

Surface Chemical ◽

X Ray ◽

International Standard ◽

Surface Chemical Analysis ◽

Analysis Determination

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424 ◽

2005 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

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Surface chemical analysis. Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis

10.3403/30276380u ◽

2015 ◽

Keyword(s):

Chemical Analysis ◽

Fluorescence Spectroscopy ◽

Environmental Analysis ◽

Total Reflection ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis

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Surface chemical analysis. Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis

10.3403/30276380 ◽

2015 ◽

Keyword(s):

Chemical Analysis ◽

Fluorescence Spectroscopy ◽

Environmental Analysis ◽

Total Reflection ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution

10.3403/30124110 ◽

2006 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Lateral Resolution ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424u ◽

2015 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

Download Full-text

Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution

10.3403/30124110u ◽

2015 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Lateral Resolution ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis

Download Full-text