Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
2006 ◽
2013 ◽
Vol 45
(9)
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pp. 1313-1316
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Keyword(s):
2015 ◽
Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)
2000 ◽
2005 ◽
2010 ◽
2011 ◽