Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators
2017 ◽
Vol 54
◽
pp. 012095
◽
1988 ◽
Vol 59
(2)
◽
pp. 165-172
◽
2000 ◽
Vol 13
(3/4/5)
◽
pp. 229
◽
1973 ◽