scholarly journals Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects

Sensors ◽  
2009 ◽  
Vol 9 (5) ◽  
pp. 3854-3874 ◽  
Author(s):  
Wen-Ming Zhang ◽  
Guang Meng ◽  
Jian-Bin Zhou ◽  
Jie-Yu Chen
Keyword(s):  
Nonlinear Dynamics ◽  
Squeeze Film ◽  
Squeeze Film Damping ◽  
Nonlinear Dynamics And Chaos ◽  
Damping Effects

Air Damping Effects of MEMS Parallel-Plate Structure Using ANSYS Thin Film Analysis

2011 ◽  
Vol 403-408 ◽  
pp. 4588-4592
Author(s):  
Xiong Xing Zhang ◽  
Shou Jun Peng ◽  
Jin Long Zou
Keyword(s):  
Thin Film ◽  
Pressure Distribution ◽  
Operating Frequency ◽  
Squeeze Film ◽  
Film Analysis ◽  
Thin Film Analysis ◽  
Squeeze Film Damping ◽  
Air Damping ◽  
Damping Effects ◽  
Accommodation Factor

ANSYS thin film analysis was adopted to simulate the effects of squeeze film damping. The relation of damping effects versus operating frequency, velocity, material accommodation factor was analyzed, and the gas squeeze film damping and pressure distribution was simulated by steady-state analysis or harmonic analysis. Moreover, pressure distribution of damping effect in plate gap both with perforated holes and without holes, were determined and compared. Simulation results show that operating frequency and the structure of microstructures are the main influencing factors to air damping and perforated holes in plate gap can control stiffness coefficients of squeezed film damping.

Coupled effects of surface interaction and damping on electromechanical stability of functionally graded nanotubes reinforced torsional micromirror actuator

2021 ◽  
pp. 030932472110368
Author(s):  
Weidong Yang ◽  
Menglong Liu ◽  
Linwei Ying ◽  
Xi Wang
Keyword(s):  
Casimir Force ◽  
Volume Fraction ◽  
Nonlocal Parameter ◽  
Saddle Points ◽  
Functionally Graded ◽  
Heteroclinic Orbits ◽  
Phase Portraits ◽  
Squeeze Film ◽  
Squeeze Film Damping ◽  
Tilting Angle

This paper demonstrated the coupled surface effects of thermal Casimir force and squeeze film damping (SFD) on size-dependent electromechanical stability and bifurcation of torsion micromirror actuator. The governing equations of micromirror system are derived, and the pull-in voltage and critical tilting angle are obtained. Also, the twisting deformation of torsion nanobeam can be tuned by functionally graded carbon nanotubes reinforced composites (FG-CNTRC). A finite element analysis (FEA) model is established on the COMSOL Multiphysics platform, and the simulation of the effect of thermal Casimir force on pull-in instability is utilized to verify the present analytical model. The results indicate that the numerical results well agree with the theoretical results in this work and experimental data in the literature. Further, the influences of volume fraction and geometrical distribution of CNTs, thermal Casimir force, nonlocal parameter, and squeeze film damping on electrically actuated instability and free-standing behavior are detailedly discussed. Besides, the evolution of equilibrium states of micromirror system is investigated, and bifurcation diagrams and phase portraits including the periodic, homoclinic, and heteroclinic orbits are described as well. The results demonstrated that the amplitude of the tilting angle for FGX-CNTRC type micromirror attenuates slower than for FGO-CNTRC type, and the increment of CNTs volume ratio slows down the attenuation due to the stiffening effect. When considering squeeze film damping, the stable center point evolves into one focus point with homoclinic orbits, and the dynamic system maintains two unstable saddle points with the heteroclinic orbits due to the effect of thermal Casimir force.

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