scholarly journals Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage

Sensors ◽  
2009 ◽  
Vol 9 (3) ◽  
pp. 2062-2075 ◽  
Author(s):  
Pin-Hsu Kao ◽  
Ching-Liang Dai ◽  
Cheng-Chih Hsu ◽  
Chi-Yuan Lee
1999 ◽  
Author(s):  
H. Shin ◽  
H. Ko ◽  
Y. Yoon ◽  
B. Choi

Abstract A new design of micromachined mirror array for display purpose from Samsung Electronics is presented. Integrating multiple functions into a component and extensive use of photolithography make this design of mirror to be simple as well as easy to make. The prototype is fabricated in an array of 50 × 50 micromirrors. The size of mirror plate is 50 × 50μm2 and the gap between them is 3μm. The mirror plate is tilted by the electrostatic force, and the angle is designed to be 10°. Driving voltage for the finished micromirrors is 28v and the tilt angle is measured as 8.9°. The response time from the rest to full tilt and back to rest position takes about 20μs when it is driven at the natural frequency of 24.7kHz. In the reliability point of view, the importance of anti-stiction coating can not be over stressed. Without one, most of the mirrors couldn’t survive a few contacts with the substrate. However, when proper anti-stiction coating is applied and atmosphere is controlled to eliminate the humidity, 94.6% of micromirrors were still rocking after 1.15 × 1010 cycles. In a series of experiments, it was possible to show this new design of micromirror array could be used as a display device, when they are driven at a certain combination of addressing and bias signals. A variable character generation and PWM-type brightness control is successfully demonstrated.


2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata

Author(s):  
Alan Huffman ◽  
John Lannon ◽  
Matthew Lueck ◽  
Christopher Gregory ◽  
Dorota Temple

2014 ◽  
Vol 4 (3) ◽  
pp. 27-32
Author(s):  
Jeevan Singh Bisht ◽  
◽  
Akshay Dvivedi ◽  
Apurbba Kumar Sharma ◽  
◽  
...  

2018 ◽  
Vol 2 (3) ◽  
pp. 33-46
Author(s):  
Mamata Rani Swain ◽  
◽  
P. R. Tripathy ◽  

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