scholarly journals A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2545
Author(s):  
Yan Li ◽  
Hao Li ◽  
Yifeng Xiao ◽  
Le Cao ◽  
Zhan-She Guo
Keyword(s):  
Measurement Error ◽  
Nonlinear Vibration ◽  
Error Compensation ◽  
Nonlinear Behavior ◽  
Compensation Method ◽  
Nonlinear Characteristics ◽  
Single Beam ◽  
Resonant Sensor ◽  
Characterization Model ◽  
Resonant Beam

A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonlinearity because of the nonlinear vibration of the resonant beam. A verification circuit is devised to imitate the nonlinear behavior of the model by matching the simulation measurement error of the frequency offset produced by the circuit block with the theoretical counterparts obtained from the model. Secondly, the principle of measurement error compensation is studied, and the compensation method dealing with nonlinear characteristics of the resonant beam is proposed by introducing a compensation beam and corresponding differential operations. The measurement error, compensation rate, and measurement residual between the two scenarios that use single beam and double beams, respectively, are derived and are compared with their simulation and experimental counterparts. The results coincide with the predicted trend, which verifies the effectiveness of the compensation method.

Error Compensation of Measurement System Based on Magnetoresistive Sensors

2012 ◽  
Vol 466-467 ◽  
pp. 854-858
Author(s):  
Wei Wang ◽  
Kai Qu ◽  
Xiong Xing Zhang ◽  
Ying Guo
Keyword(s):  
Measurement Error ◽  
Measurement System ◽  
Error Compensation ◽  
Simple Approach ◽  
Compensation Method ◽  
New Method ◽  
Sensor Output ◽  
Maximum Angle ◽  
Resistive Sensor ◽  
Magnetoresistive Sensors

A measurement system based on the magneto-resistive sensor is described and its error factors and influences are analyzed as well. A reasonable and simple approach is presented to compensate the measurement error from Magneto-resistive Sensor output. Firstly, the principle of the new method is illustrated. Secondly, the steps of the error compensation are introduced. Finally, the test is carried out, results are shown that the maximum angle value of deviation is no more than 2° and compensation method can be used in common measurement system based on magneto-resistive sensors.

Application and novel angle measurement error compensation method of circular gratings

2019 ◽  
Vol 27 (8) ◽  
pp. 1719-1726 ◽  
Author(s):  
于连栋 YU Lian-dong ◽  
鲍文慧 BAO Wen-hui ◽  
赵会宁 ZHAO Hui-ning ◽  
贾华坤 JIA Hua-kun ◽  
张 润 ZHANG Run
Keyword(s):  
Measurement Error ◽  
Error Compensation ◽  
Angle Measurement ◽  
Compensation Method

The Research of Error Compensation for the 3D Surface Measurement

2012 ◽  
Vol 482-484 ◽  
pp. 2192-2196
Author(s):  
Yuan Tian ◽  
Zi Ma ◽  
Peng Li
Keyword(s):  
Measurement Error ◽  
Fuzzy Inference System ◽  
Error Compensation ◽  
Point Cloud ◽  
Fuzzy Inference ◽  
Surface Measurement ◽  
Anfis Model ◽  
Inference System ◽  
Surface Error ◽  
3D Surface

For improving precision of 3D surface measurement equipments, which are playing important role in reverse engineering, the Adaptive Network based Fuzzy Inference System (ANFIS) is developed to reconstruct 3D surface error, and the measurement error of point cloud is compensated by the presented 3D error ANFIS model. The precision of 3D surface measurement equipments has been improved noticeably

A channel phase error compensation method for multi-channel synthetic aperture ladar

Optik ◽  
2019 ◽  
Vol 178 ◽  
pp. 830-840
Author(s):  
Shuai Wang ◽  
Maosheng Xiang ◽  
Bingnan Wang ◽  
Fubo Zhang ◽  
Yirong Wu
Keyword(s):  
Error Compensation ◽  
Phase Error ◽  
Compensation Method ◽  
Synthetic Aperture

An on-machine error compensation method for an ultra-precision turning machine

2017 ◽  
Vol 233 (5) ◽  
pp. 1608-1613
Author(s):  
Xicong Zou ◽  
Xuesen Zhao ◽  
Guo Li ◽  
Zengqiang Li ◽  
Zhenjiang Hu ◽  
...  
Keyword(s):  
Error Compensation ◽  
Rapid Development ◽  
Compensation Method ◽  
Machining Accuracy ◽  
Manufacturing Cost ◽  
Program Code ◽  
Machine Error ◽  
Measurement Results ◽  
Ultra Precision ◽  
Compensation Technique

On-machine error compensation (OMEC) is efficient at improving machining accuracy without increasing extra manufacturing cost, and involves the on-machine measurement (OMM) of machining accuracy and modification of program code based on the measurement results. As an excellent OMM technique, chromatic confocal sensing allows for the rapid development of accurate and reliable error compensation technique. The present study integrated a non-contact chromatic confocal probe into an ultra-precision machine for OMM and OMEC of machined components. First, the configuration and effectiveness of the OMM system were briefly described, and the relevant OMEC method was presented. With the OMM result, error compensation software was then developed to automatically generate a modified program code for error compensation. Finally, a series of cutting experiments were performed to verify the validity of the proposed OMEC method. The experimental results demonstrate that the proposed error compensation method is reliable and considerably improves the form error of machined components.

scholarly journals A Non-Delay Error Compensation Method for Dual-Driving Gantry-Type Machine Tool

Processes ◽  
2020 ◽  
Vol 8 (7) ◽  
pp. 748
Author(s):  
Qi Liu ◽  
Hong Lu ◽  
Xinbao Zhang ◽  
Yu Qiao ◽  
Qian Cheng ◽  
...  
Keyword(s):  
Machine Tool ◽  
Error Compensation ◽  
Prediction Method ◽  
Compensation Method ◽  
Industrial Robots ◽  
Numerical Control ◽  
Heavy Duty ◽  
Positioning Errors ◽  
Compensation Methods ◽  
Type Machine

The drive at the center of gravity (DCG) principle has been adopted in computer numerical control (CNC) machines and industrial robots that require heavy-duty and quick feeds. Using this principle requires accurate corrections of positioning errors. Conventional error compensation methods may cause vibrations and unstable control performances due to the delay between compensation and motor motion. This paper proposes a new method to reduce the positioning errors of the dual-driving gantry-type machine tool (DDGTMT), namely, a typical DCG-principle-based machine tool. An error prediction method is proposed to characterize errors online. An algorithm is proposed to quickly and accurately compensate the errors of the DDGTMT. Experiment results verify that the non-delay error compensation method proposed in this paper can effectively improve the accuracy of the DDGTMT.

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