scholarly journals Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Sensors ◽  
2021 ◽  
Vol 21 (6) ◽  
pp. 2070
Author(s):  
Yuan Yao ◽  
Debin Pan ◽  
Jianbo Wang ◽  
Tingting Dong ◽  
Jie Guo ◽  
...  
Keyword(s):  
Optical Measurement ◽  
Design Method ◽  
Mechanical Systems ◽  
High Sensitivity ◽  
Micro Electro Mechanical Systems ◽  
Mems Sensor ◽  
Interference Measurement ◽  
New Type ◽  
Grating Interferometer ◽  
Processing Circuit

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

Simulation of Gold Nanoparticles Aggravating MEMS Cantilever Optical Static Detection Biochip

2013 ◽  
Vol 694-697 ◽  
pp. 966-970 ◽  
Author(s):  
Yue Tao Ge ◽  
Xiao Tong Yin
Keyword(s):  
Gold Nanoparticles ◽  
Low Cost ◽  
Mechanical Systems ◽  
Side Wall ◽  
High Sensitivity ◽  
Detection Sensitivity ◽  
Gene Detection ◽  
Micro Electro Mechanical Systems ◽  
Target Dna ◽  
Static Detection

A kind of gene detection biochip model based on biological micro electro mechanical systems (BioMEMS) technology and micro optical electro mechanical systems (MOEMS) technology is designed and simulated. In order to detect whether there are nucleic acid components in the testing samples, the biochip in this study issues horizontal light by laser, then receives and reads the deformation signals of MEMS cantilever by optical detector. The MEMS optical reflecting system can amplify MEMS cantilever deformation signal 22 times by micro reflectors which are set on the side wall of the cantilever free end. In order to improve optical detection sensitivity, gold nanoparticles (GNPs) which are combined with hybridization information is taken to aggravate MEMS cantilever, and employ Au - S chemical bond of GNPs and dithiol HS(CH2)6SH to combine and fix DNA probe, and then employ target DNA which is marked with biotin to combine GNPs by Biotin - Streptavidin combining. The simulation results show that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.

Dynamically Reconfigurable Multivariable MEMS Sensor Array for Unattended Systems

2013 ◽  
Vol 558 ◽  
pp. 456-464
Author(s):  
Stephen van der Velden ◽  
Ian Powlesland ◽  
Steve C. Galea ◽  
Jugdutt Singh
Keyword(s):  
Magnetic Fields ◽  
Real Time ◽  
Structural Damage ◽  
Sensor Array ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Dynamically Reconfigurable ◽  
Mems Sensor ◽  
Simulated Environment ◽  
Variable Environments

This paper presents a dynamically reconfigurable multivariable Micro-Electro-Mechanical Systems (MEMS) sensor array, capable of reconfiguration in real time, to meet the sensing demands of unattended systems operating in highly variable environments, with an emphasis on maintaining operation of these systems in the presence of structural damage. This array is comprised of multiple instances of identical sensors which can be dynamically reconfigured to target a variety of measurands including acceleration, rotational rate, magnetic fields, temperature, air pressure and density. A simulated environment is used to illustrate how the array can be dynamically reconfigured to respond to variations in several of these parameters. Also shown are simulations that demonstrate the ability of such a sensor array to continue operation in the presence of structural damage.

Analyzing of micro-electro-mechanical systems (MEMS) sensor for pumping aggregates

Sensor Review ◽  
2018 ◽  
Vol 38 (2) ◽  
pp. 194-198
Author(s):  
Milos Milovancevic ◽  
Edvard Tijan
Keyword(s):  
Fuzzy Inference ◽  
Mechanical Systems ◽  
Vibration Monitoring ◽  
Micro Electro Mechanical Systems ◽  
Inference System ◽  
Content Type ◽  
Mems Sensor ◽  
Wide Range ◽  
Smart Mobile Phone ◽  
Smart Mobile

Purpose The purpose of this research paper is to develop and analyze micro-electro-mechanical systems sensor for vibration monitoring of pumping aggregate. Design/methodology/approach The system is based on smart sensor and smart mobile phone. Findings The numerous measurements on a wide range of turbo aggregates were performed to establish the operating condition of pumping aggregates. Originality/value Afterwards, the influence of vibration at different positions on the output vibration of the pumping aggregate was analyzed by adaptive neuro fuzzy inference system method.

A Study on a Diode-Bridge Type Differential Capacitance Detection Circuit

2006 ◽  
Vol 9 (2) ◽  
Author(s):  
Takahiro Matsuo ◽  
Joanna Pawłat ◽  
Jinxing Liang ◽  
Ken Kunitomo ◽  
Toshitsugu Ueda
Keyword(s):  
Mechanical Systems ◽  
High Sensitivity ◽  
Differential Capacitance ◽  
Capacitance Sensor ◽  
Micro Electro Mechanical Systems ◽  
Small Capacitance ◽  
Mathematical Simulations ◽  
Detection Circuit ◽  
Capacitance Detection ◽  
Bridge Type

AbstractDifferential capacitance sensor with movable electrodes is usually applied for accelerometers, pressure gauges, etc. because of its high sensitivity and resolution. Two axis inclination sensor with differential capacitance structure using MEMS (Micro Electro Mechanical Systems) technology has recently been designed for industrial and environmental purposes. The initial capacitance of the sensor should be very low, as few pF, therefore, a C-V converter circuit, which is able to detect very small capacitance variations is required. In this study, the particular principle of a “diode-bridge type differential capacitance detection circuit” has been analyzed. After the mathematical simulations performed by using PSpice simulator, the detection of the capacitance variations in fF order resolution are considered.

scholarly journals Evaluation of a Micro-Electro Mechanical Systems Spectral Sensor for Soil Properties Estimation

Land ◽  
2021 ◽  
Vol 10 (1) ◽  
pp. 63
Author(s):  
Konstantinos Karyotis ◽  
Theodora Angelopoulou ◽  
Nikolaos Tziolas ◽  
Evgenia Palaiologou ◽  
Nikiforos Samarinas ◽  
...  
Keyword(s):  
Soil Properties ◽  
Soil Analysis ◽  
Low Cost ◽  
Mechanical Systems ◽  
Least Squares Regression ◽  
Micro Electro Mechanical Systems ◽  
Spectral Angle Mapper ◽  
Mems Sensor ◽  
Laboratory Techniques ◽  
Non Destructive

Soil properties estimation with the use of reflectance spectroscopy has met major advances over the last decades. Their non-destructive nature and their high accuracy capacity enabled a breakthrough in the efficiency of performing soil analysis against conventional laboratory techniques. As the need for rapid, low cost, and accurate soil properties’ estimations increases, micro electro mechanical systems (MEMS) have been introduced and are becoming applicable for informed decision making in various domains. This work presents the assessment of a MEMS sensor (1750–2150 nm) in estimating clay and soil organic carbon (SOC) contents. The sensor was first tested under various experimental setups (different working distances and light intensities) through its similarity assessment (Spectral Angle Mapper) to the measurements of a spectroradiometer of the full 350–2500 nm range that was used as reference. MEMS performance was evaluated over spectra measured from 102 samples in laboratory conditions. Models’ calibrations were performed using random forest (RF) and partial least squares regression (PLSR). The results provide insights that MEMS could be employed for soil properties estimation, since the RF model demonstrated solid performance over both clay (R2 = 0.85) and SOC (R2 = 0.80). These findings pave the way for supporting daily agriculture applications and land related policies through the exploration of a wider set of soil properties.

Development of imaging plate for a TEM and its characteristics

1989 ◽  
Vol 47 ◽  
pp. 100-101
Author(s):  
N. Mori ◽  
T. Oikawa ◽  
Y. Harada ◽  
J. Miyahara ◽  
T. Matsuo
Keyword(s):  
Dynamic Range ◽  
Protective Layer ◽  
High Sensitivity ◽  
Imaging Plate ◽  
Phosphor Layer ◽  
Imaging Device ◽  
X Ray Imaging ◽  
New Type ◽  
Basic Characteristics ◽  
Reading System

The Imaging Plate (IP) is a new type imaging device, which was developed for diagnostic x ray imaging. We have reported that usage of the IP for a TEM has many merits; those are high sensitivity, wide dynamic range, and good linearity. However in the previous report the reading system was prototype drum-type-scanner, and IP was also experimentally made, which phosphor layer was 50μm thick with no protective layer. So special care was needed to handle them, and they were used only to make sure the basic characteristics. In this article we report the result of newly developed reading, printing system and high resolution IP for practical use. We mainly discuss the characteristics of the IP here. (Precise performance concerned with the reader and other system are reported in the other article.)Fig.1 shows the schematic cross section of the IP. The IP consists of three parts; protective layer, phosphor layer and support.

Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems

2011 ◽  
Vol 36 (7) ◽  
pp. 1089 ◽  
Author(s):  
Wei-Chao Chiu ◽  
Chun-Che Chang ◽  
Jiun-Ming Wu ◽  
Ming-Chang M. Lee ◽  
Jia-Min Shieh
Keyword(s):  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Optical Phase ◽  
Phase Modulators ◽  
Optical Phase Modulators
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