scholarly journals Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature

Sensors ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 4160
Author(s):  
Shuyao Fan ◽  
Wen Wang ◽  
Xueling Li ◽  
Yana Jia ◽  
Yuan Sun ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Composite Structure ◽  
Wave Mode ◽  
Design Parameters ◽  
Extreme High Temperature ◽  
Spurious Mode ◽  
The One ◽  
Simulation Parameters

A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al2O3/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical coupling of modes (COM) model. The SAW propagation characteristics in the layered structure were investigated theoretically by employing the finite element method (FEM). Multiple acoustic-wave modes that occurred in the AlN composite structure was analyzed, and the corresponding suppression of spurious mode was proposed. The COM simulation parameters corresponding to the effective acoustic-wave mode were extracted, and the optimized parameters of the one–port SAW resonator with a high-quality factor were determined.

New Composite Electrode for High Temperature Surface Acoustic Wave Device

2021 ◽  
pp. 129768
Author(s):  
Xinyu Song ◽  
Hao Jin ◽  
Shurong Dong ◽  
Miling Zhang ◽  
Jikai Zhang ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Composite Electrode ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Device ◽  
Wave Device ◽  
Temperature Surface

scholarly journals Langasite Based Surface Acoustic Wave Sensors for High Temperature Chemical Detection in Harsh Environment

2009 ◽  
Vol 1 (1) ◽  
pp. 963-966 ◽  
Author(s):  
G. Tortissier ◽  
L. Blanc ◽  
A. Tetelin ◽  
J-L. Lachaud ◽  
M. Benoit ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harsh Environment ◽  
Chemical Detection ◽  
Acoustic Wave Sensors ◽  
Wave Sensors

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure

2021 ◽  
Author(s):  
Keyuan Gong ◽  
Zhaohui Wu ◽  
Yu-Po Wong ◽  
Yawei Li ◽  
Qi Liang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Transverse Mode ◽  
Phase Shifters ◽  
Design Parameters ◽  
Mode Operation ◽  
Mode Suppression ◽  
Acoustic Wave Resonators ◽  
Piston Mode

Abstract This paper discusses influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated (TC) surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement are considered from IDT aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.

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