scholarly journals Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 3959
Author(s):  
Rui Hao ◽  
Huijun Yu ◽  
Bei Peng ◽  
Haixiang Zhan ◽  
Wu Zhou
Keyword(s):  
Residual Stress ◽  
Lead Zirconate Titanate ◽  
Inertial Sensors ◽  
Inertial Sensor ◽  
Lead Zirconate ◽  
Micro Electro Mechanical System ◽  
Sensor Calibration ◽  
Long Term Storage ◽  
Piezoelectric Effects ◽  
Abnormal Phenomenon

A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.

Static and Dynamic Techniques for Residual Stress Measurements in Microelectromechanical Systems

2006 ◽  
Author(s):  
Mary Vechery ◽  
Andrew Dick ◽  
Luke Currano ◽  
Madan Dubey ◽  
B. Balachandran
Keyword(s):  
Residual Stress ◽  
Lead Zirconate Titanate ◽  
Microelectromechanical Systems ◽  
Measurement Techniques ◽  
Single Layer ◽  
Lead Zirconate ◽  
Nonlinear Frequency ◽  
Stress Measurements ◽  
Stress Levels ◽  
Dynamic Techniques

A major concern in the development of microelectromechanical systems (MEMS) is the presence of residual stress. Residual stress, which is produced during the fabrication of multi-layer thin-film structures, can significantly affect the performance of microscale devices. Though experimental measurement techniques are accurate, actual stress measurements can vary dramatically from run to run and wafer to wafer. For this reason, modeling of this stress is a challenging task. Past work has focused on experimental, static techniques for determining residual stress levels in single-layer and bi-layer structures. In this effort, two different experimental techniques are used for determining residual stress levels in four-layer piezoelectrically driven cantilever and clamped-clamped structures. One of the techniques is based on wafer bow measurements, and the other technique is a dynamic technique that is based on parameter identification from nonlinear frequency-response data. The devices studied, which consist of a piezoelectric layer or lead zirconate titanate (PZT) layer, are fabricated with varying lengths, widths, and material layer thickness. The results obtained from the static and dynamic techniques are compared and discussed.

Residual Stress Control to Optimize Pzt Mems Performance

2002 ◽  
Vol 741 ◽  
Author(s):  
M.S. Kennedy ◽  
D.F. Bahr ◽  
C.D. Richards ◽  
R.F. Richards
Keyword(s):  
Residual Stress ◽  
Lead Zirconate Titanate ◽  
Mechanical Energy ◽  
Electrical Energy ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
Membrane Performance ◽  
Boron Doped ◽  
Pzt Film ◽  
Bulge Testing

ABSTRACTFlexing piezoelectric membranes can be used to convert mechanical energy to electrical energy. The overall deflection of individual membranes is impacted by the residual stress in the system. Membranes comprised of silicon dioxide, Ti/Pt, lead- zirconate- titanate (PZT), and TiW/Au layers deposited on a micromachined boron doped silicon wafer were examined for both morphology and residual stress. By characterizing the membrane residual stress induced during processing with x-ray diffraction, wafer curvature, and bulge testing and identifying methods to reduce stress, the membrane performance and reliability can be optimized. For Zr:Ti ratios of 52:48, the residual stress in the PZT was 350 MPa tensile, with an overall effective stress in the composite membrane of 150 MPa. A reduction of stress was accomplished by changing the PZT chemistry to 40:60 Zr:Ti in the PZT to obtain a stress in the PZT of 160 MPa tensile and an overall effective membrane stress of 100 MPa. The crystallization of the 52:48 PZT film at 700 °C causes a 28% reduction in the thickness of the film.

A rapid seismic data calibration technique using integrated micro-electro-mechanical system inertial sensor groups for a 3C vertical seismic profile

Geophysics ◽  
2017 ◽  
Vol 82 (6) ◽  
pp. P109-P118
Author(s):  
Huailiang Li ◽  
Xianguo Tuo ◽  
Tong Shen ◽  
Mark Julian Henderson ◽  
Jérémie Courtois
Keyword(s):  
Mechanical System ◽  
Seismic Data ◽  
Inertial Sensors ◽  
Inertial Sensor ◽  
Low Cost ◽  
Measuring Method ◽  
Seismic Profile ◽  
Micro Electro Mechanical System ◽  
Vertical Seismic Profile ◽  
Sensor Package

Calibration of 3C vertical seismic profile (VSP) data is an exciting challenge because the orientation of the tool is random when only seismic data are considered. We have augmented the sensor package on the VSP tool with micro-electro-mechanical system (MEMS) inertial sensors and applied a gesture measuring method to determine the tool orientation and calibration. This technique can quickly produce high precision, orientation, and angle information when integrated with the seismometer. The augmented sensor package consists of a low-cost triaxial MEMS gyroscope, an electronic compass, and an accelerometer. The technique to process the gesture information is based on the OpenGL software for 3D modeling. We have tested this approach on a large number of field data sets and it appeared to be faster and more reliable than other approaches.

Electrical and Mechanical Examination of PLZT/PZT Graded Structure for Photovoltaic Driven Piezoelectric Transformers

2010 ◽  
Vol 636-637 ◽  
pp. 369-373 ◽  
Author(s):  
Lucjan Kozielski ◽  
Malgorzata Plonska ◽  
M.M. Bucko
Keyword(s):  
Lead Zirconate Titanate ◽  
Ceramic Materials ◽  
Lead Zirconate ◽  
Functionally Graded ◽  
Electrical Anisotropy ◽  
Piezoelectric Transformer ◽  
Graded Materials ◽  
Graded Structure ◽  
Mechanical Characterisation ◽  
Piezoelectric Effects

Lanthanum-modified lead zirconate titanate (PLZT) ceramic materials have gained considerable attention due to their photostriction, which is the superposition of photovoltaic and piezoelectric effects. Functionally Graded Materials (FGM) implemented in construction of Piezoelectric Transformer (PT) can be used for direct converting photonic energy to electrical one by implementing photostrictive actuators with piezoelectric generator in one graded structure of piezoelectric transformer. Possible application in electronic industry needs thoroughly electrical and mechanical characterisation of this new FGM structure constructed from the PLZT/PZT material. Measurements presented in this work reveal high electrical anisotropy of this graded structure and the Impedance Spectroscopy (IS) proved to be a method capable to present such inequality in form of well separated semicircles. Additionally, dielectric measurements demonstrated that the characteristics of the graded structure are not a simply addition of starting materials parameters but are deeply influenced by a predominantly diffusion direction. Finally, additional nano-mechanical and -electrical methods are used for clarifying the complexity of the integration process of FGMs.

A Comprehensive Overview of Inertial Sensor Calibration Techniques

2016 ◽  
Vol 139 (1) ◽  
Author(s):  
Shashi Poddar ◽  
Vipan Kumar ◽  
Amod Kumar
Keyword(s):  
High Precision ◽  
Kalman Filtering ◽  
Inertial Measurement Unit ◽  
Inertial Sensors ◽  
Inertial Sensor ◽  
Measurement Unit ◽  
Sensor Calibration ◽  
Comprehensive Overview ◽  
Inertial Measurement ◽  
Calibration Techniques

Inertial measurement unit (IMU) comprising of the accelerometer and gyroscope is prone to various deterministic errors like bias, scale factor, and nonorthogonality, which need to be calibrated carefully. In this paper, a survey has been carried out over different calibration techniques that try to estimate these error parameters. These calibration schemes are discussed under two broad categories, that is, calibration with high-end equipment and without any equipment. Traditional calibration techniques use high-precision equipment to generate references for calibrating inertial sensors and are generally laboratory-based setup. Inertial sensor calibration without the use of any costly equipment is further studied under two subcategories: ones based on multiposition method and others with Kalman filtering framework. Later, a brief review of vision-based inertial sensor calibration schemes is also provided in this work followed by a discussion which indicates different shortcomings and future scopes in the area of inertial sensor calibration.

scholarly journals Low-Cost MEMS-Based NARX Model for GPS-Denied Areas

2020 ◽  
pp. 58-70
Keyword(s):  
Inertial Sensors ◽  
Inertial Sensor ◽  
Low Cost ◽  
Autonomous Vehicle ◽  
Field Tests ◽  
Micro Electro Mechanical System ◽  
Integrated System ◽  
Main Challenge ◽  
Autonomous Vehicle Navigation ◽  
Narx Model

Autonomous vehicle navigation has witnessed a huge revolutionary revision regarding development in Micro-Electro Mechanical System (MEMS) technology. Most recently, Strapdown Inertial Navigation System (SDINS) has successfully been integrated with Global Positioning System (GPS). However, different grades of MEMS inertial sensors are available and choosing the convenient grade is quite important. Noises in inertial sensor are mostly treated through de-noising the additive errors to improve the precision of SDINS output. Unfortunately, integration in SDINS mechanization causes a growing in SDINS error output which considered the main challenge in integrating MEMS inertial sensors with GPS. This paper aims to promote the long-term performance of the MEMS-SDINS/GPS integrated system. A new integrated structure is proposed to model the nonlinearities that exist in SDINS dynamics in addition to the error uncertainty in the inertial sensors’ measurements. A robust Nonlinear AutoRegressive models with eXogenous inputs (NARX) based algorithm are designed for data fusion in the proposed GPS/INS integrated system. Validation for the proposed integrated system has been carried out using different field tests data in order to assess the accuracy of the system during GPS denied environment. The results obtained demonstrate that the proposed NARX model is applicative and satisfactory which shows a desired prediction performance.

scholarly journals A Low Cost Civil Vehicular Seamless Navigation Technology Based on Enhanced RISS/GPS between the Outdoors and an Underground Garage

Electronics ◽  
2020 ◽  
Vol 9 (1) ◽  
pp. 120
Author(s):  
Ningbo Li ◽  
Lianwu Guan ◽  
Yanbin Gao ◽  
Zhejun Liu ◽  
Ye Wang ◽  
...  
Keyword(s):  
Inertial Sensors ◽  
Inertial Sensor ◽  
Low Cost ◽  
Satellite Navigation ◽  
Micro Electro Mechanical System ◽  
Indoor Navigation ◽  
Indoor Environments ◽  
Integrated Navigation ◽  
Parking Lots ◽  
Positioning Algorithm

Vehicles have to rely on satellite navigation in an open environment. However, satellite navigation cannot obtain accurate positioning information for vehicles in the interior of underground parking lots, as they comprise a semi-enclosed navigation space. Therefore, vehicular navigation needs to take into consideration both outdoor and indoor environments. Actually, outdoor navigation and indoor navigation require different positioning methods, and it is of great importance to choose a reasonable navigation and positioning algorithm solution for vehicles. Fortunately, the integrated navigation of the Global Positioning System (GPS) and the Micro-Electro-Mechanical System (MEMS) inertial navigation system could solve the problem of switching navigation algorithms in the entrance and exit of underground parking lots. This paper proposes a low cost vehicular seamless navigation technology based on the reduced inertial sensor system (RISS)/GPS between the outdoors and an underground garage. Specifically, the enhanced RISS is a positioning algorithm based on three inertial sensors and one odometer, which could achieve a similar location effect as the full model integrated navigation, reduce the costs greatly, and improve the efficiency of each sensor.

Study of PZT Film Stress in Multilayer Structures for MEMS Devices

1999 ◽  
Vol 605 ◽  
Author(s):  
E. Zakar ◽  
M. Dubey ◽  
R. Polcawich ◽  
B. Piekarski ◽  
R. Piekarz ◽  
...  
Keyword(s):  
Residual Stress ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Film Stress ◽  
Dielectric Films ◽  
Mems Devices ◽  
Annealing Conditions ◽  
Pzt Film ◽  
Final Stress

AbstractResidual stress in the multilayer Si/Dielectric/Pt/PZT/Pt stack was measured as a function of annealing conditions, sol-gel derived PZT (Lead Zirconate Titanate -52/48) thickness, SiO2 and/or Si3N4 dielectric films thickness. Residual stress in the Si3N4 layer varied from -201 to +1275 MPa and from -430 to + 511 MPa in the Si02 layer. Furnace annealing of the bottom Pt film reduced the stress over rapid thermal annealing (RTA). Stress due to PZT films was the controlling factor for the final stress of the stack. Upon increasing PZT thickness, stress became less tensile for Si3N4 dielectric and more tensile for Si02. The deposition of the top Pt on PZT followed by RTA at 300°C in nitrogen had a minimal effect on the final stress of the stack. The average tensile stress for the Si/Si02 /Pt/PZT/Pt and Si/Si3N4/Pt/PZT/Pt stacks was 140 ± 25 and 476±235 MPa respectively.

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