scholarly journals A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

Sensors ◽  
2020 ◽  
Vol 20 (13) ◽  
pp. 3711
Author(s):  
HanYang Xu ◽  
Yulong Zhao ◽  
Kai Zhang ◽  
Kyle Jiang

This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12° to ±360°, and the resolution of the sensor was 0.4°. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors.

Electronics ◽  
2020 ◽  
Vol 9 (8) ◽  
pp. 1240
Author(s):  
Bo Li ◽  
Shengbing Zhang ◽  
Hanlu Zhang ◽  
Shiyu Wang ◽  
Feng He

Steering motor is of vital importance in UAV’s health-monitoring system, to which its supply current is the most critical characteristic representing health statue of UAV. In order to conduct continuous measuring on the steering motor’s current of large dynamic range, in this paper, a current measurement method is therefore proposed on the basis of twin nonlinear shunt. The proposed method adopts the twin diode as the current sampling device, which not only realizes measurement range and relative constant resolution, but also ensures continuity of the measurement due to the eliminated operation of range switching. The associated diode is used to compensate the temperature of core temperature of the shunt diode, and to make the nonlinear-shunt more adaptive for the case of junction being heated under larger current. The working principle, real-time compensation method and circuit implementation of our method are discussed in detail. Experimental test results suggest that the measurement error of the proposed method is less than 4.5% when the measurement current varies between 10 mA to 10 A, maintaining the relative resolution at an almost constant level, while preventing the conventional method of frequent range switching from generating glitches. In addition to the ensured continuity, information-rich details of the current are sustained, contributing to the UAV’s health-monitoring system. The proposal can also be applied to other applications concerning large dynamic current detection, including, but not limited to, industrial control, motor control, etc.


Author(s):  
F. Ouyang ◽  
D. A. Ray ◽  
O. L. Krivanek

Electron backscattering Kikuchi diffraction patterns (BKDP) reveal useful information about the structure and orientation of crystals under study. With the well focused electron beam in a scanning electron microscope (SEM), one can use BKDP as a microanalysis tool. BKDPs have been recorded in SEMs using a phosphor screen coupled to an intensified TV camera through a lens system, and by photographic negatives. With the development of fiber-optically coupled slow scan CCD (SSC) cameras for electron beam imaging, one can take advantage of their high sensitivity and wide dynamic range for observing BKDP in SEM.We have used the Gatan 690 SSC camera to observe backscattering patterns in a JEOL JSM-840A SEM. The CCD sensor has an active area of 13.25 mm × 8.83 mm and 576 × 384 pixels. The camera head, which consists of a single crystal YAG scintillator fiber optically coupled to the CCD chip, is located inside the SEM specimen chamber. The whole camera head is cooled to about -30°C by a Peltier cooler, which permits long integration times (up to 100 seconds).


2020 ◽  
Vol 13 (5) ◽  
pp. 1085-1093
Author(s):  
XU Da ◽  
◽  
YUE Shi-xin ◽  
ZHANG Guo-yu ◽  
SUN Gao-fei ◽  
...  

Nano Energy ◽  
2021 ◽  
Vol 85 ◽  
pp. 105970
Author(s):  
Lianhui Li ◽  
Shouwei Gao ◽  
Mingming Hao ◽  
Xianqing Yang ◽  
Sijia Feng ◽  
...  

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