scholarly journals Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

Sensors ◽  
2019 ◽  
Vol 19 (18) ◽  
pp. 3954 ◽  
Author(s):  
Rugved Likhite ◽  
Aishwaryadev Banerjee ◽  
Apratim Majumder ◽  
Mohit Karkhanis ◽  
Hanseup Kim ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
Signal To Noise Ratio ◽  
Parametric Amplification ◽  
Competitive Response ◽  
Humidity Change ◽  
Power Mems ◽  
And Parametric Amplification ◽  
Capacitive Humidity Sensor ◽  
Intrinsic Gain

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25–85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip.

scholarly journals Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

2019 ◽  
Author(s):  
Rugved Likhite ◽  
Aishwaryadev Banerjee ◽  
Apratim Majumder ◽  
Mohit Karkhanis ◽  
Hanseup Kim ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
Signal To Noise Ratio ◽  
Parametric Amplification ◽  
Competitive Response ◽  
Humidity Change ◽  
Power Mems ◽  
And Parametric Amplification ◽  
Capacitive Humidity Sensor ◽  
Intrinsic Gain

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). 11-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25-85%. The dynamic characterization of the device also revealed a response time ~1s and demonstrated a competitive response with respect to a commercially available reference chip.

Design and characterization of a low thermal drift capacitive humidity sensor by inkjet-printing

2014 ◽  
Vol 195 ◽  
pp. 123-131 ◽  
Author(s):  
Almudena Rivadeneyra ◽  
José Fernández-Salmerón ◽  
Manuel Agudo ◽  
Juan A. López-Villanueva ◽  
Luis Fermín Capitan-Vallvey ◽  
...  
Keyword(s):  
Inkjet Printing ◽  
Humidity Sensor ◽  
Thermal Drift ◽  
Capacitive Humidity Sensor

Fabrication and Characterization of an Ultrasensitive Humidity Sensor Based on Chalcogenide Glassy Alloy Thin Films

2021 ◽  
Author(s):  
Surabhi Mishra ◽  
◽  
Priyanka Chaudhary ◽  
B. C. Yadav ◽  
Ahmad Umar ◽  
...  
Keyword(s):  
Thin Films ◽  
Humidity Sensor ◽  
Glassy Alloy ◽  
Fabrication And Characterization

scholarly journals A search for transiting planets in the β Pictoris system

2018 ◽  
Vol 615 ◽  
pp. A145 ◽  
Author(s):  
M. Mol Lous ◽  
E. Weenk ◽  
M. A. Kenworthy ◽  
K. Zwintz ◽  
R. Kuschnig
Keyword(s):  
Signal To Noise Ratio ◽  
Large Fraction ◽  
Young Star ◽  
High Signal ◽  
Data Set ◽  
Transiting Planets ◽  
Using Data ◽  
Exoplanet Systems ◽  
Transit Signals

Context. Transiting exoplanets provide an opportunity for the characterization of their atmospheres, and finding the brightest star in the sky with a transiting planet enables high signal-to-noise ratio observations. The Kepler satellite has detected over 365 multiple transiting exoplanet systems, a large fraction of which have nearly coplanar orbits. If one planet is seen to transit the star, then it is likely that other planets in the system will transit the star too. The bright (V = 3.86) star β Pictoris is a nearby young star with a debris disk and gas giant exoplanet, β Pictoris b, in a multi-decade orbit around it. Both the planet’s orbit and disk are almost edge-on to our line of sight. Aims. We carry out a search for any transiting planets in the β Pictoris system with orbits of less than 30 days that are coplanar with the planet β Pictoris b. Methods. We search for a planetary transit using data from the BRITE-Constellation nanosatellite BRITE-Heweliusz, analyzing the photometry using the Box-Fitting Least Squares Algorithm (BLS). The sensitivity of the method is verified by injection of artificial planetary transit signals using the Bad-Ass Transit Model cAlculatioN (BATMAN) code. Results. No planet was found in the BRITE-Constellation data set. We rule out planets larger than 0.6 RJ for periods of less than 5 days, larger than 0.75 RJ for periods of less than 10 days, and larger than 1.05 RJ for periods of less than 20 days.

scholarly journals Fabrication and characterization of Ru-doped LiCuFe2O4 nanoparticles and their capacitive and resistive humidity sensor applications

2019 ◽  
Vol 474 ◽  
pp. 563-569 ◽  
Author(s):  
V. Manikandan ◽  
Florin Tudorache ◽  
Iulian Petrila ◽  
R.S. Mane ◽  
V. Kuncser ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
Sensor Applications ◽  
Fabrication And Characterization

scholarly journals Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry

2014 ◽  
Vol 1 (1) ◽  
Author(s):  
G. Tosolini ◽  
J. M. Michalik ◽  
R. Córdoba ◽  
J. M. de Teresa ◽  
F. Pérez-Murano ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Room Temperature ◽  
Signal To Noise Ratio ◽  
Static Deflection ◽  
Magnetic Structures ◽  
Dual Beam ◽  
Piezoresistive Cantilevers ◽  
Good Signal ◽  
The Magnetic Field

AbstractWe present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.

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