scholarly journals Self-Calibration and Performance Control of MEMS with Applications for IoT

Sensors ◽  
2018 ◽  
Vol 18 (12) ◽  
pp. 4411 ◽  
Author(s):  
Jason Clark
Keyword(s):  
Microelectromechanical Systems ◽  
Pressure Sensors ◽  
Process Variations ◽  
Absolute Temperature ◽  
Performance Control ◽  
Thermally Induced ◽  
Self Calibration ◽  
Sensing Applications ◽  
Thermally Induced Vibrations ◽  
And Performance

A systemic problem for microelectromechanical systems (MEMS) has been the large gap between their predicted and actual performances. Due to process variations, no two MEMS have been able to perform identically. In-factory calibration is often required, which can represent as much as three-fourths of the manufacturing costs. Such issues are challenges for microsensors that require higher accuracy and lower cost. Towards addressing these issues, this paper describes how microscale attributes may be used to enable MEMS to accurately calibrate themselves without external references, or enable actual devices to match their predicted performances. Previously, we validated how MEMS with comb drives can be used to autonomously self-measure their change in geometry in going from layout to manufactured, and we verified how MEMS can be made to increase or decrease their effective mass, damping, and or stiffness in real-time to match desired specifications. Here, we present how self-calibration and performance control may be used to accurately sense and extend the capabilities of a variety of sensing applications for the Internet of things (IoT). Discussions of IoT applications include: (1) measuring absolute temperature due to thermally-induced vibrations; (2) measuring the stiffness of atomic force microscope or biosensor cantilevers; (3) MEMS weighing scales; (4) MEMS gravimeters and altimeters; (5) inertial measurement units that can measure all four non-inertial forces; (6) self-calibrating implantable pressure sensors; (7) diagnostic chips for quality control; (8) closing the gap from experiment to simulation; (9) control of the value of resonance frequency to counter drift or to match modes; (10) control of the value of the quality factor; and (11) low-amplitude Duffing nonlinearity for wideband high-Q resonance.

scholarly journals An Investigation of the Physical and Electrical Properties of Knitted Electrodes When Subjected to Multi-Axial Compression and Abrasion

Proceedings ◽  
2021 ◽  
Vol 68 (1) ◽  
pp. 2
Author(s):  
Arash M. Shahidi ◽  
Theodore Hughes-Riley ◽  
Carlos Oliveira ◽  
Tilak Dias
Keyword(s):  
Heart Rate ◽  
Electrical Properties ◽  
Applied Load ◽  
Pressure Sensors ◽  
Electrical Performance ◽  
Electronic Textiles ◽  
Heart Rate Monitors ◽  
Mechanical Loads ◽  
And Performance ◽  
Over Time

Knitted electrodes are a key component to many electronic textiles including sensing devices, such as pressure sensors and heart rate monitors; therefore, it is essential to assess the electrical performance of these knitted electrodes under different mechanical loads to understand their performance during use. The electrical properties of the electrodes could change while deforming, due to an applied load, which could occur in the uniaxial direction (while stretched) or multiaxial direction (while compressed). The properties and performance of the electrodes could also change over time when rubbed against another surface due to the frictional force and generated heat. This work investigates the behavior of a knitted electrode under different loading conditions and after multiple abrasion cycles.

Correlation Between Ion Gel Characteristics and Performance of Ionic Pressure Sensors

2021 ◽  
Author(s):  
Woo Young Lee ◽  
Yong Min Kim ◽  
Jin Han Kwon ◽  
Hong Chul Moon
Keyword(s):  
Ionic Liquid ◽  
Pressure Sensors ◽  
Convenient Approach ◽  
Ion Gel ◽  
And Performance ◽  
Ion Gels

In this study, a convenient approach is proposed to tune the properties of ion gels by utilizing mixed ionic liquid (IL) systems. Herein, a binary IL system consisting of 1-butyl-3-methylimidazolium...

Thermally induced vibrations of a self-shadowed split-blanket solar array

1995 ◽  
Vol 32 (2) ◽  
pp. 302-311 ◽  
Author(s):  
Earl A. Thornton ◽  
Gregory P. Chini ◽  
David W. Gulik
Keyword(s):  
Solar Array ◽  
Thermally Induced ◽  
Thermally Induced Vibrations

Effect of Modified NanoSiO2 Agents on the Morphologies and Performances of UHMWPE Microporous Membrane via Thermally Induced Phase Separation

2016 ◽  
Vol 848 ◽  
pp. 726-732 ◽  
Author(s):  
Rong Liu ◽  
Yan Wang ◽  
Jing Zhu ◽  
Zu Ming Hu ◽  
Jun Rong Yu
Keyword(s):  
Phase Separation ◽  
Water Flux ◽  
Microporous Membranes ◽  
Thermally Induced Phase Separation ◽  
X Ray Diffraction ◽  
Scanning Calorimetry ◽  
Thermally Induced ◽  
And Performance ◽  
Surface Modified ◽  
Ultra High Molecular Weight

The effects of Modified NanoSiO2 Agents on the morphology and performance of ultra-high-molecular weight polyethylene (UHMWPE) microporous membranes via thermally induced phase separation were investigated in this work. The NanoSiO2 was surface modified by silane coupling agent KH570 (KH570-NanoSiO2). Differential scanning calorimetry (DSC) and X-Ray Diffraction (XRD) were performed to obtain crystallization of UHMWPE/white oil/ KH570-NanoSiO2 doped system. The morphology and performance of the prepared UHMWPE microporous membranes were characterized with scanning electron microscopy (SEM) and microfiltration experiments. The results showed that the morphology of UHMWPE membrane could be disturbed by KH570-NanoSiO2. Porosity and the rejection of Bovine serum albumin (BSA) of the blend membrane increased with increasing concentration of Modified NanoSiO2, while the water flux slightly decreased.

Sensing and Control of Thermally Induced Vibrations of Stationary Blades Using Piezoelectric Materials

2017 ◽  
Vol 43 (3) ◽  
pp. 1301-1311 ◽  
Author(s):  
K. S. Al-Athel ◽  
H. M. Al-Qahtani ◽  
M. Sunar ◽  
L. Malgaca ◽  
A. Omar
Keyword(s):  
Piezoelectric Materials ◽  
Thermally Induced ◽  
Thermally Induced Vibrations ◽  
And Control

RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Low Cost ◽  
Impedance Matching ◽  
Phase Shifters ◽  
Rf Systems ◽  
Mems Technology ◽  
And Performance ◽  
Rf Performance

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.

scholarly journals Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide

2022 ◽  
Vol 11 (1) ◽  
pp. 15-20
Author(s):  
Parviz Saeidi ◽  
Bernhard Jakoby ◽  
Gerald Pühringer ◽  
Andreas Tortschanoff ◽  
Gerald Stocker ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Noble Metals ◽  
Microelectromechanical Systems ◽  
Propagation Loss ◽  
Slot Waveguide ◽  
Plasmonic Waveguides ◽  
Propagation Length ◽  
Plasmonic Material ◽  
Sensing Applications

Abstract. Plasmonic waveguides have attracted much attention owing to the associated high field intensity at the metal–dielectric interface and their ability to confine the modes at the nanometer scale. At the same time, they suffer from relatively high propagation loss, which is due to the presence of metal. Several alternative materials have been introduced to replace noble metals, such as transparent conductive oxides (TCOs). A particularly popular TCO is indium tin oxide (ITO), which is compatible with standard microelectromechanical systems (MEMS) technology. In this work, the feasibility of ITO as an alternative plasmonic material is investigated for infrared absorption sensing applications: we numerically design and optimize an ITO-based plasmonic slot waveguide for a wavelength of 4.26 µm, which is the absorption line of CO2. Our optimization is based on a figure of merit (FOM), which is defined as the confinement factor divided by the imaginary part of the effective mode index (i.e., the intrinsic damping of the mode). The obtained optimal FOM is 3.2, which corresponds to 9 µm and 49 % for the propagation length (characterizing the intrinsic damping) and the confinement factor, respectively.

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