scholarly journals Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

Sensors ◽  
2018 ◽  
Vol 18 (7) ◽  
pp. 2030
Author(s):  
Bo Zhao ◽  
Weijia Shi ◽  
Jiawei Zhang ◽  
Ming Zhang ◽  
Xue Qi ◽  
...  
2020 ◽  
pp. 67-73
Author(s):  
N.D. YUsubov ◽  
G.M. Abbasova

The accuracy of two-tool machining on automatic lathes is analyzed. Full-factor models of distortions and scattering fields of the performed dimensions, taking into account the flexibility of the technological system on six degrees of freedom, i. e. angular displacements in the technological system, were used in the research. Possibilities of design and control of two-tool adjustment are considered. Keywords turning processing, cutting mode, two-tool setup, full-factor model, accuracy, angular displacement, control, calculation [email protected]


Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3740
Author(s):  
Olafur Oddbjornsson ◽  
Panos Kloukinas ◽  
Tansu Gokce ◽  
Kate Bourne ◽  
Tony Horseman ◽  
...  

This paper presents the design, development and evaluation of a unique non-contact instrumentation system that can accurately measure the interface displacement between two rigid components in six degrees of freedom. The system was developed to allow measurement of the relative displacements between interfaces within a stacked column of brick-like components, with an accuracy of 0.05 mm and 0.1 degrees. The columns comprised up to 14 components, with each component being a scale model of a graphite brick within an Advanced Gas-cooled Reactor core. A set of 585 of these columns makes up the Multi Layer Array, which was designed to investigate the response of the reactor core to seismic inputs, with excitation levels up to 1 g from 0 to 100 Hz. The nature of the application required a compact and robust design capable of accurately recording fully coupled motion in all six degrees of freedom during dynamic testing. The novel design implemented 12 Hall effect sensors with a calibration procedure based on system identification techniques. The measurement uncertainty was ±0.050 mm for displacement and ±0.052 degrees for rotation, and the system can tolerate loss of data from two sensors with the uncertainly increasing to only 0.061 mm in translation and 0.088 degrees in rotation. The system has been deployed in a research programme that has enabled EDF to present seismic safety cases to the Office for Nuclear Regulation, resulting in life extension approvals for several reactors. The measurement system developed could be readily applied to other situations where the imposed level of stress at the interface causes negligible material strain, and accurate non-contact six-degree-of-freedom interface measurement is required.


Author(s):  
Sergey Pisetskiy ◽  
Mehrdad Kermani

This paper presents an improved design, complete analysis, and prototype development of high torque-to-mass ratio Magneto-Rheological (MR) clutches. The proposed MR clutches are intended as the main actuation mechanism of a robotic manipulator with five degrees of freedom. Multiple steps to increase the toque-to-mass ratio of the clutch are evaluated and implemented in one design. First, we focus on the Hall sensors’ configuration. Our proposed MR clutches feature embedded Hall sensors for the indirect torque measurement. A new arrangement of the sensors with no effect on the magnetic reluctance of the clutch is presented. Second, we improve the magnetization of the MR clutch. We utilize a new hybrid design that features a combination of an electromagnetic coil and a permanent magnet for improved torque-to-mass ratio. Third, the gap size reduction in the hybrid MR clutch is introduced and the effect of such reduction on maximum torque and the dynamic range of MR clutch is investigated. Finally, the design for a pair of MR clutches with a shared magnetic core for antagonistic actuation of the robot joint is presented and experimentally validated. The details of each approach are discussed and the results of the finite element analysis are used to highlight the required engineering steps and to demonstrate the improvements achieved. Using the proposed design, several prototypes of the MR clutch with various torque capacities ranging from 15 to 200 N·m are developed, assembled, and tested. The experimental results demonstrate the performance of the proposed design and validate the accuracy of the analysis used for the development.


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