scholarly journals A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 346 ◽  
Author(s):  
Shudong Wang ◽  
Xueyong Wei ◽  
Yinsheng Weng ◽  
Yulong Zhao ◽  
Zhuangde Jiang
Keyword(s):  
High Sensitivity ◽  
Measurement Range ◽  
Tilt Sensor

A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range

2016 ◽  
Author(s):  
Shudong Wang ◽  
Juan Ren ◽  
Tianyi Zhang ◽  
Yinsheng Weng ◽  
Zhuangde Jiang ◽  
...  
Keyword(s):  
High Sensitivity ◽  
Measurement Range ◽  
Tilt Sensor

scholarly journals A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1375
Author(s):  
Junji Pu ◽  
Kai Zeng ◽  
Yulie Wu ◽  
Dingbang Xiao
Keyword(s):  
Light Source ◽  
Optical System ◽  
High Sensitivity ◽  
Measurement Range ◽  
Optical Force ◽  
Zero Bias ◽  
Micro Electro Mechanical Systems ◽  
Force Effect ◽  
High Measurement ◽  
Mems Technology

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.

scholarly journals Nonlinear Hydraulic Pressure Response of an Improved Fiber Tip Interferometric High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 2548
Author(s):  
Wei Huang ◽  
Zhe Zhang ◽  
Jun He ◽  
Bin Du ◽  
Changrui Liao ◽  
...  
Keyword(s):  
High Pressure ◽  
Nonlinear Response ◽  
Arc Discharge ◽  
High Sensitivity ◽  
Measurement Range ◽  
Hydraulic Pressure ◽  
Discharge Process ◽  
Pressure Sensitivity ◽  
Diaphragm Thickness ◽  
Order Of Magnitude

We demonstrate a silica diaphragm-based fiber tip Fabry–Perot interferometer (FPI) for high-pressure (40 MPa) sensing. By using a fiber tip polishing technique, the thickness of the silica diaphragm could be precisely controlled and the pressure sensitivity of the fabricated FPI sensor was enhanced significantly by reducing the diaphragm thickness; however, the relationship between the pressure sensitivity and diaphragm thickness is not linear. A high sensitivity of −1.436 nm/MPa and a linearity of 0.99124 in hydraulic pressure range of 0 to 40 MPa were demonstrated for a sensor with a diaphragm thickness of 4.63 μm. The achieved sensitivity was about one order of magnitude higher than the previous results reported on similar fiber tip FPI sensors in the same pressure measurement range. Sensors with a thinner silica diaphragm (i.e., 4.01 and 2.09 μm) rendered further increased hydraulic pressure sensitivity, but yield a significant nonlinear response. Two geometric models and a finite element method (FEM) were carried out to explain the nonlinear response. The simulation results indicated the formation of cambered internal silica surface during the arc discharge process in the fiber tip FPI sensor fabrication.

Room-Temperature Wide Measurement-Range Optical Fiber Fabry–Perot Tilt Sensor With Liquid Marble

2018 ◽  
Vol 18 (1) ◽  
pp. 170-177 ◽  
Author(s):  
Cheng Li ◽  
Xue Li ◽  
Xiyu Yu ◽  
Xiaobin Peng ◽  
Tian Lan ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Room Temperature ◽  
Measurement Range ◽  
Liquid Marble ◽  
Fabry Perot ◽  
Tilt Sensor

scholarly journals Ultra-Sensitive Flexible Tactile Sensor Based on Graphene Film

Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 730 ◽  
Author(s):  
Xiaozhou Lü ◽  
Liang Qi ◽  
Hanlun Hu ◽  
Xiaoping Li ◽  
Guanghui Bai ◽  
...  
Keyword(s):  
Industrial Robot ◽  
Graphene Film ◽  
High Sensitivity ◽  
Tactile Sensor ◽  
Measurement Range ◽  
Tactile Sensors ◽  
Piezoresistive Effect ◽  
Large Measurement ◽  
Pet Film ◽  
Maximum Measurement

Flexible tactile sensor can be integrated into artificial skin and applied in industrial robot and biomedical engineering. However, the presented tactile sensors still have challenge in increasing sensitivity to expand the sensor’s application. Aiming at this problem, this paper presents an ultra-sensitive flexible tactile sensor. The sensor is based on piezoresistive effect of graphene film and is composed of upper substrate (PDMS bump with a size of 5 mm × 7 mm and a thickness of 1 mm), medial Graphene/PET film (Graphene/PET film with a size of 5 mm × 7 mm, PET with a hardness of 2H) and lower substrate (PI with fabricated electrodes). We presented the structure and reduced the principle of the sensor. We also fabricated several sample devices of the sensor and carried out experiment to test the performance. The results show that the sensor performed an ultra high sensitivity of 10.80/kPa at the range of 0–4 kPa and have a large measurement range up to 600 kPa. The sensor has 4 orders of magnitude between minimum resolution and maximum measurement range which have great advantage compared with state of the art. The sensor is expected to have great application prospect in robot and biomedical.

Design of a New-Type Electro-Optical Sensor Based on the Total-Internal Reflection Theory in Heterodyne Interferometry

2015 ◽  
Vol 1105 ◽  
pp. 136-140
Author(s):  
Shinn Fwu Wang ◽  
Fu Hsi Kao ◽  
An Li Liu
Keyword(s):  
Refractive Index ◽  
Optical Sensor ◽  
Incident Angle ◽  
Optical Fiber Sensor ◽  
High Sensitivity ◽  
Measurement Range ◽  
Heterodyne Interferometry ◽  
Optical Source ◽  
Bk7 Glass ◽  
New Type

In this paper, a new-type electro-optical sensor based on the total-internal reflections theory in heterodyne interferometry is proposed. The sensor is designed as a semi-circle shape. It is made of BK7 glass with the refractive index of 1.51509. And the end surface of the sensor is designed as a micro-mirror. The phase difference between s-and p-polarizations at the output of the optical fiber sensor can be obtained when a heterodyne optical source is launched into the electro-optical sensor at a suitable incident angle. By numerical calculation, the resolution of the system by using the intensity method can reach refractive index unit (RIU) in the measurement range of. The electro-optical sensor could be valuable for chemical, biological and biochemical sensing. It is with some advantages, such as, high resolution and stability, high sensitivity and real-time measurement.

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