scholarly journals A High-Sensitive Pressure Sensor Using a Single-Mode Fiber Embedded Microbubble with Thin Film Characteristics

Sensors ◽  
2017 ◽  
Vol 17 (6) ◽  
pp. 1192 ◽  
Author(s):  
Guanjun Wang ◽  
Xinglin Liu ◽  
Zhiguo Gui ◽  
Yongquan An ◽  
Jinyu Gu ◽  
...  
2003 ◽  
Vol 17 (08n09) ◽  
pp. 1199-1204 ◽  
Author(s):  
Jin Seok Heo ◽  
Jung Ju Lee ◽  
Jeong Ok Lim

This paper presents the newly designed fiber optic pressure sensor using the TR-EFPI fiber optic sensor with a single mode fiber (SMF), and a micro fabricated diaphragm. The output signal of TR-EFPI fiber optic pressure sensor can be easily analyzed based on the spliced loss based model and large deflection theory. Then, we can design the optimal length between the thin film of diaphragm and the end of single mode fiber. From these analyses, the relation between the applied pressure and the output signal of TR-EFPI fiber optic sensor can be simulated. Based on these processes, we can design the TR-EFPI fiber optic pressure sensor measuring various conditions by changing the size of thin film. As the newly designed TR-EFPI fiber optic pressure sensor can be fabricated in small size and has good sensitivity, it can be applied to medical instrument like pressure sensor and force sensor for catheter and minimally invasive surgery robot for safer surgery.


2020 ◽  
Author(s):  
N.A. Mustaffa ◽  
M.R. Mokhtar ◽  
M.F. Azman ◽  
Z. Yusoff ◽  
H.A. Abdul Rashid ◽  
...  

Materials ◽  
2020 ◽  
Vol 13 (17) ◽  
pp. 3697
Author(s):  
Stefano Salvatori ◽  
Sara Pettinato ◽  
Armando Piccardi ◽  
Vadim Sedov ◽  
Alexey Voronin ◽  
...  

Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is defined by the end-face of a single mode fiber and the diamond diaphragm surface. Hence, pressure is evaluated by measuring the cavity length by an optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of Chemical Vapor Deposition (CVD) diamond, in terms of high hardness, low thermal expansion, and ultra-high thermal conductivity, the realized sensors have been characterized up to 16.5 MPa at room temperature. Preliminary characterizations demonstrate the feasibility of such diamond-on-Si membrane structure for pressure transduction. The proposed sensing system represents a valid alternative to conventional solutions, overcoming the drawback related to electromagnetic interference on the acquired weak signals generated by standard piezoelectric sensors.


2010 ◽  
Vol 49 (27) ◽  
pp. 5043 ◽  
Author(s):  
Jiulin Gan ◽  
Li Shen ◽  
Qing Ye ◽  
Zhengqing Pan ◽  
Haiwen Cai ◽  
...  

Coatings ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 358 ◽  
Author(s):  
Shubin Zhang ◽  
Zhenjun Shao ◽  
Jinrong Liu ◽  
Meixue Zong ◽  
Jian Shen ◽  
...  

A pressure-assisted arc discharge method of preparing silicon microbubbles with a glass tube was utilized for decreasing the bubble film’s thickness and improving the bubble’s uniformity. By controlling the arc discharge intensity, discharge time and the position of the fiber carefully, the thickness of the microbubble film was reduced to the micrometer scale. Later, the thin film of the microbubble was transferred to the end the single-mode-fiber/glass-tube structure, for forming the FP (Fabry–Perot) interference cavity. As the thin film is sensitive to the outer pressure, such a configuration could be used for a high-sensitive-pressure measurement. Experimental results show that the sensitivity of this FP (Fabry–Perot) cavity was 6790 pm/MPa when the outer pressure ranges from 100 to 1600 kPa, and the relationship between the structural parameters of the thin film and the outer pressure was theoretically analyzed. Moreover, this special structure made of the end silicon film microbubble is more suitable for high-sensitivity applications.


2001 ◽  
Vol 13 (11) ◽  
pp. 1212-1214 ◽  
Author(s):  
Yang Zhao ◽  
F. Ansari

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