scholarly journals Visualized Multiprobe Electrical Impedance Measurements with STM Tips Using Shear Force Feedback Control

Sensors ◽  
2016 ◽  
Vol 16 (6) ◽  
pp. 757
Author(s):  
Luis Botaya ◽  
Xavier Coromina ◽  
Josep Samitier ◽  
Manel Puig-Vidal ◽  
Jorge Otero
Keyword(s):  
Feedback Control ◽  
Shear Force ◽  
Electrical Impedance ◽  
Force Feedback ◽  
Impedance Measurements ◽  
Stm Tips

Shear force feedback control of flexible robot arms

1995 ◽  
Vol 11 (5) ◽  
pp. 760-765 ◽  
Author(s):  
Zheng-Hua Luo ◽  
N. Kitamura ◽  
Bao-Zhu Guo
Keyword(s):  
Feedback Control ◽  
Shear Force ◽  
Force Feedback ◽  
Flexible Robot ◽  
Robot Arms

Bilateral Force Feedback Control for a Vehicle-Type Tele-Mobility System

2013 ◽  
Vol 133 (8) ◽  
pp. 795-803
Author(s):  
Kazuki Nagase ◽  
Shutaro Yorozu ◽  
Takahiro Kosugi ◽  
Yuki Yokokura ◽  
Seiichiro Katsura
Keyword(s):  
Feedback Control ◽  
Force Feedback ◽  
Vehicle Type ◽  
Mobility System

scholarly journals Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 632
Author(s):  
Yuan Cao ◽  
Julia Floehr ◽  
Sven Ingebrandt ◽  
Uwe Schnakenberg
Keyword(s):  
Microfluidic Chip ◽  
Electrical Impedance ◽  
Microfluidic System ◽  
Equivalent Circuits ◽  
Proof Of Concept ◽  
Impedance Measurements ◽  
Close Match ◽  
Aspect Ratios ◽  
Lamination Process ◽  
Dry Film

In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a microfluidic chip with embedded, vertically arranged microelectrodes for electrical impedance measurements. To trap and fix the object under test to the electrodes, an aperture is formed in the center of the ring-shaped electrodes in combination with a microfluidic suction channel underneath. In a proof-of-concept, the setup is characterized by electrical impedance measurements with polystyrene and ZrO2 spheres. The electrical impedance is most sensitive at approximately 2 kHz, and its magnitudes reveal around 200% higher values when a sphere is trapped. The magnitude values depend on the sizes of the spheres. Electrical equivalent circuits are applied to simulate the experimental results with a close match.

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