scholarly journals On Bandwidth Characteristics of Tuning Fork Micro-Gyroscope with Mechanically Coupled Sense Mode

Sensors ◽  
2014 ◽  
Vol 14 (7) ◽  
pp. 13024-13045 ◽  
Author(s):  
Yunfang Ni ◽  
Hongsheng Li ◽  
Libin Huang ◽  
Xukai Ding ◽  
Haipeng Wang
Keyword(s):  
Tuning Fork ◽  
Sense Mode

A Multiple-Beam Tuning-Fork Gyroscope With High Quality Factors

2009 ◽  
Author(s):  
Ren Wang ◽  
Shiva Krishna Durgam ◽  
Zhili Hao ◽  
Linda Vahala
Keyword(s):  
Tuning Fork ◽  
Rate Sensitivity ◽  
Sense Mode ◽  
Quality Factors ◽  
Drive Mode ◽  
High Quality ◽  
Multiple Beam ◽  
Frequency Split ◽  
Operation Frequency ◽  
Mask Fabrication

This paper reports on the design, fabrication, and testing of a multiple-beam tuning-fork gyroscope featuring high Quality factors (Q). A multiple-beam tuning-fork structure is designed to achieve high Qs in its drive mode and sense mode. The gyroscope is fabricated on a 30μm-thick SOI wafer using a one-mask fabrication process. The measured Qs of the fabricated gyroscope are 162,060 in the drive-mode and 85,168 in the sense mode at an operation frequency of 16.8kHz. Under a frequency split of 6Hz, the prototype device demonstrates a rate sensitivity of 0.02mV/°/sec.

Design and Implementation of a Multiple-Beam Tuning-Fork Gyroscope

2011 ◽  
Author(s):  
Ren Wang ◽  
Peng Cheng ◽  
Fei Xie ◽  
Zhili Hao ◽  
Darrin Young
Keyword(s):  
Tuning Fork ◽  
Rate Sensitivity ◽  
Silicon On Insulator ◽  
Sense Mode ◽  
Thermoelastic Damping ◽  
Quality Factors ◽  
Drive Mode ◽  
Multiple Beam ◽  
Equivalent Impedance ◽  
Mode Vibration

This paper presents the design, fabrication, and experimental results of a multiple-beam tuning-fork gyroscope (MB-TFG). Based on a numerical model of thermoelastic damping, a multiple-beam tuning-fork structure is designed with high Quality factors (Qs) in its two operation modes. A simple mask that defines the device through trenches is employed to implement this MB-TFG design on silicon-on-insulator wafers. The highest measured Qs of the fabricated MB-TFGs in vacuum are 255,000 in the drive-mode and 103,000 in the sense-mode, at a frequency of 15.7kHz. Under a frequency difference of 4Hz between the two modes (operation frequency is 16.8kHz) and a drive-mode vibration amplitude of 3.0μm, the measured rate sensitivity is 80μVPP/°/s with an equivalent impedance of 2.5MΩ. The calculated overall rate resolution of this device is 0.377hr°/√Hz.

scholarly journals Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Sensors ◽  
2019 ◽  
Vol 19 (16) ◽  
pp. 3455 ◽  
Author(s):  
Li ◽  
Gao ◽  
Jin ◽  
Liu ◽  
Guan ◽  
...  
Keyword(s):  
Sensitivity Analysis ◽  
Analytical Solutions ◽  
Tuning Fork ◽  
Fem Simulation ◽  
Micro Electro Mechanical System ◽  
Stiffness Ratio ◽  
Sense Mode ◽  
Mechanical Sensitivity ◽  
Improvement Rate ◽  
Theoretical Results

This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.

Design and Simulation of MEMS Based Tuning Fork Micro-Gyroscope

2011 ◽  
Vol 110-116 ◽  
pp. 5036-5043
Author(s):  
Suthin Khankhua ◽  
Muhammad Waseem Ashraf ◽  
Nitin Afzulpurkar ◽  
Shahzadi Tayyaba ◽  
Chumnarn Punyasai
Keyword(s):  
Vibration Amplitude ◽  
Tuning Fork ◽  
Proof Mass ◽  
Inertial Sensor ◽  
Sense Mode ◽  
Small Vibration ◽  
Common Mode ◽  
Microelectromechanical System ◽  
Proposed Model ◽  
Simulation Results

In this paper, design, analysis and simulation of microelectromechanical system (MEMS) based inertial sensor type of tuning fork micro gyroscope have been presented. CoventorWare has been used for design and simulation. The proposed design has improved the performances and structure for small vibration amplitude to minimize the mechanical crosstalk. Simulation results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF ensure that the proposed model has no common mode that causes mechanical crosstalk.

scholarly journals Development and Comparative Analysis of Electrochemically Etched Tungsten Tips for Quartz Tuning Fork Sensor

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 286
Author(s):  
Ashfaq Ali ◽  
Naveed Ullah ◽  
Asim Ahmad Riaz ◽  
Muhammad Zeeshan Zahir ◽  
Zuhaib Ali Khan ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Mechanical Stability ◽  
Electrochemical Etching ◽  
Research Work ◽  
Cone Angle ◽  
Quartz Tuning Fork ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
High Quality ◽  
Scanning Electron

Quartz Tuning Fork (QTF) based sensors are used for Scanning Probe Microscopes (SPM), in particular for near-field scanning optical microscopy. Highly sharp Tungsten (W) tips with larger cone angles and less tip diameter are critical for SPM instead of platinum and iridium (Pt/Ir) tips due to their high-quality factor, conductivity, mechanical stability, durability and production at low cost. Tungsten is chosen for its ease of electrochemical etching, yielding high-aspect ratio, sharp tips with tens of nanometer end diameters, while using simple etching circuits and basic electrolyte chemistry. Moreover, the resolution of the SPM images is observed to be associated with the cone angle of the SPM tip, therefore Atomic-Resolution Imaging is obtained with greater cone angles. Here, the goal is to chemically etch W to the smallest possible tip apex diameters. Tips with greater cone angles are produced by the custom etching procedures, which have proved superior in producing high quality tips. Though various methods are developed for the electrochemical etching of W wire, with a range of applications from scanning tunneling microscopy (SPM) to electron sources of scanning electron microscopes, but the basic chemical etching methods need to be optimized for reproducibility, controlling cone angle and tip sharpness that causes problems for the end users. In this research work, comprehensive experiments are carried out for the production of tips from 0.4 mm tungsten wire by three different electrochemical etching techniques, that is, Alternating Current (AC) etching, Meniscus etching and Direct Current (DC) etching. Consequently, sharp and high cone angle tips are obtained with required properties where the results of the W etching are analyzed, with optical microscope, and then with field emission scanning electron microscopy (FE-SEM). Similarly, effects of varying applied voltages and concentration of NaOH solution with comparison among the produced tips are investigated by measuring their cone angle and tip diameter. Moreover, oxidation and impurities, that is, removal of contamination and etching parameters are also studied in this research work. A method has been tested to minimize the oxidation on the surface and the tips were characterized with scanning electron microscope (SEM).

Low-volume liquid delivery and nanolithography using a nanopipette combined with a quartz tuning fork-atomic force microscope

Nanoscale ◽  
2012 ◽  
Vol 4 (20) ◽  
pp. 6493 ◽  
Author(s):  
Sangmin An ◽  
Corey Stambaugh ◽  
Gunn Kim ◽  
Manhee Lee ◽  
Yonghee Kim ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Tuning Fork ◽  
Quartz Tuning Fork ◽  
Atomic Force ◽  
Low Volume ◽  
Liquid Delivery
Sign in / Sign up

Export Citation Format

Share Document