Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process
2015 ◽
Vol 135
(9)
◽
pp. 372-373
◽
2012 ◽
Vol 24
(1)
◽
pp. 61-69
◽
2018 ◽
Vol 135
◽
pp. 63-71
◽
2011 ◽
Vol 21
(1)
◽
pp. 015014
◽
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