Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology
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2012 ◽
Vol 29
(8)
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pp. 088501
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2002 ◽
Vol 101
(3)
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pp. 332-337
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2011 ◽
Vol 16
(2)
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pp. 167-170
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