scholarly journals CSRR-SICW High Sensitivity High Temperature Sensor Based on Si3N4 Ceramics

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 459
Author(s):  
Shujing Su ◽  
Ting Ren ◽  
Lili Zhang ◽  
Fujia Xu

A new type of wireless passive, high sensitivity, high temperature sensor was designed to meet the real-time temperature test in the harsh aero-engine environment. The sensor consists of a complementary split ring resonator and a substrate integrated circular waveguide (CSRR-SICW) structure and is based on high temperature resistant Si3N4 ceramic as the substrate material. Temperature is measured by real-time monitoring of the resonant frequency of the sensor. In addition, the ambient temperature affects the dielectric constant of the dielectric substrate, and the resonant frequency of the sensor is determined by the dielectric constant, so the function relationship between temperature and resonant frequency can be established. The experimental results show that the resonant frequency of the sensor decreases from 11.3392 GHz to 11.0648 GHz in the range of 50–1000 °C. The sensitivity is 123 kHz/°C and 417 kHz/°C at 50–450 °C and 450–1000 °C, respectively, and the average test sensitivity is 289 kHz/°C. Compared with previously reported high temperature sensors, the average test sensitivity is approximately doubled, and the test sensitivity at 450–1000 °C is approximately three times higher. Therefore, the proposed high sensitivity sensor has promising prospects for high temperature measurement.

2009 ◽  
Vol 421-422 ◽  
pp. 375-380 ◽  
Author(s):  
Yukio Higuchi ◽  
Hirozumi Ogawa ◽  
Daisuke Kuroda ◽  
Masahiko Kimura ◽  
Hiroshi Takagi ◽  
...  

Ceramic materials based on lead titanate, lead niobate and bismuth layer-structured ferroelectrics (BLSF) were studied to develop piezoelectric ceramics for high temperature sensor applications. Compositional modification enabled lead titanate and lead niobate type ceramics to exhibit good piezoelectric properties at 500°C . The Curie temperature for one BLSF, CaBi4Ti4O15 was close to 800°C, though the piezoelectric constant was smaller than those of lead titanate and lead niobate ceramics. These ceramics seem to be good candidates for use as high temperature sensor materials. In addition, textured SrBi2Nb2O9 (SBN), another BLSF, ceramics with various orientation factors were fabricated through the templated grain growth (TGG) method. The resonant frequency of 76% textured SBN varied linearly with temperature and exhibited stable temperature characteristics. The temperature coefficient of the resonant frequency was –0.85 ppm/°C from –50 to 250°C, and was smaller than that of a quartz oscillator. Therefore, textured SBN ceramics are suitable for use as a resonator material when stable resonant frequency is needed in a high temperature range.


Sensors ◽  
2020 ◽  
Vol 20 (19) ◽  
pp. 5598
Author(s):  
Honggang Hao ◽  
Dexu Wang ◽  
Zhu Wang ◽  
Bo Yin ◽  
Wei Ruan

In order to improve the sensitivity of liquid dielectric constant measurements, a liquid dielectric constant sensor based on a cubic container structure is proposed for the first time. The cubic container, which consists of a dielectric substrate with a split resonant ring (SRR) and microstrip lines, can enhance the electric field intensity in the measuring area. High sensitivity can be obtained from measuring the dielectric constant with the characteristics of the structure resonate. The research results show that the resonant frequency of the sensor is shifted from 7.69 GHz to 5.70 GHz, with about a 2 GHz frequency offset, when the dielectric constant of the sample varied from 1 to 10. A resonance frequency offset of 200 MHz for the per unit dielectric constant is achieved, which is excellent regarding performance. The permittivity of oil with a different metal content is measured by using the relation between the fitted permittivity and the resonant frequency. The relative error is less than 1.5% and the sensitivity of measuring is up to 3.45%.


1994 ◽  
Author(s):  
Yonghang Shen ◽  
Yanqi Wang ◽  
Linhua Ye ◽  
Zuchang Ding

Micromachines ◽  
2017 ◽  
Vol 8 (10) ◽  
pp. 301 ◽  
Author(s):  
Dan Yan ◽  
Yong Yang ◽  
Yingping Hong ◽  
Ting Liang ◽  
Zong Yao ◽  
...  

2019 ◽  
Vol 31 (1) ◽  
pp. 35-38 ◽  
Author(s):  
Chen Zhu ◽  
Yiyang Zhuang ◽  
Bohong Zhang ◽  
Roman Muhammad ◽  
Philip P. Wang ◽  
...  

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