scholarly journals Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 85
Author(s):  
Nhat Minh Dang ◽  
Zhao-Ying Wang ◽  
Ti-Yuan Wu ◽  
Tra Anh Khoa Nguyen ◽  
Ming-Tzer Lin

This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the TiNi thin film with a Cr adhesion layer had better mechanical properties. The bulge test showed that TiNi thin film with a Cr adhesion had a higher Young’s modulus and lower residual stress. From the thermal cycling experiment, it was found that the Cr adhesion layer buffered the mismatch between TiNi and SiNx. Additionally, the thermal cycling test was also used to measure the thermal expansion coefficient of the films, and the fatigue test showed that the Cr layer significantly improved the fatigue resistance of the TiNi film.

1998 ◽  
Vol 64 (3) ◽  
pp. 413-417 ◽  
Author(s):  
Katsutoshi KURIBAYASHI ◽  
Seiji SHIMIZU ◽  
Masaaki YOSHITAKE ◽  
Sooichi OGAWA

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.


2008 ◽  
Vol 62 (17-18) ◽  
pp. 2791-2794 ◽  
Author(s):  
T. Shahrabi ◽  
S. Sanjabi ◽  
E. Saebnoori ◽  
Z.H. Barber

2007 ◽  
Vol 515 (18) ◽  
pp. 7222-7226 ◽  
Author(s):  
C.K. Huang ◽  
W.M. Lou ◽  
C.J. Tsai ◽  
Tung-Chuan Wu ◽  
Hung-Yi Lin

Scanning ◽  
2017 ◽  
Vol 2017 ◽  
pp. 1-5
Author(s):  
Xiaofei Fu ◽  
Chao Liu ◽  
Xili Lu ◽  
Xianli Li ◽  
Jingwei Lv ◽  
...  

The structure and nanoscale mechanical properties of Ni48.8Mn27.2Ga24 thin film fabricated by DC magnetron sputtering are investigated systematically. The thin film has the austenite state at room temperature with the L21 Hesuler structure. During nanoindentation, stress-induced martensitic transformation occurs on the nanoscale for the film annealed at 823 K for 1 hour and the shape recovery ratio is up to 85.3%. The associated mechanism is discussed.


2003 ◽  
Vol 2003.41 (0) ◽  
pp. 45-46
Author(s):  
Tomotaka HONDA ◽  
Hitoshi TAKAGI ◽  
Hiroaki MISAWA ◽  
Toyokazu KUBO

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