scholarly journals Design and Manufacturing of a High-Sensitivity Cutting Force Sensor Based on AlSiCO Ceramic

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 63
Author(s):  
Taobo Gong ◽  
You Zhao ◽  
Yulong Zhao ◽  
Lukang Wang ◽  
Yu Yang ◽  
...  

On-line cutting force measurement is an effective way to monitor processing quality, improve processing accuracy, and protect the tool. In high-speed and ultra-precision machining, status monitoring is particularly necessary to ensure machining accuracy. However, the cutting force is very small in high speed and ultra-precision machining. Therefore, high-sensitivity cutting force sensors are needed. Current commercial cutting force sensors have defects such as large volume, low compatibility, and high price. In particular, the sensitivity of cutting force sensor needs to be improved for high-speed and ultra-precision machining status monitoring. This paper provides a possible solution by embedding the sensor in the tool and selecting sensitive materials with high piezoresistive coefficient. In this paper, the structural design of the sensor and the fabrication of the sensitive material SiAlCO ceramic are carried out, and then the sensor is packaged and tested. The test results show that the cutting force sensor’s sensitivity was as high as 219.38 mV/N, which is a feasible way to improve cutting force sensor’s compatibility and sensitivity.

2014 ◽  
Vol 599-601 ◽  
pp. 1135-1138
Author(s):  
Chao Zhe Ma ◽  
Jin Song Du ◽  
Yi Yang Liu

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.


2010 ◽  
Vol 455 ◽  
pp. 632-636
Author(s):  
R.J. Song ◽  
J.L. Niu ◽  
Dong Hai Chen

Ultra-precision machine tools is an important machinery equipment to implement ultra-precision machining. Current development and the trend of the ultra-precision machine tools was analyzed. The factors influencing machining accuracy were pointed out from the viewpoint of system. Some suggestions were put forward on the domestic development and research of the ultra-precision machine tools.


Author(s):  
Yunming Zhu ◽  
Guicheng Wang ◽  
Pingkuan Zhang ◽  
Lijie Ma ◽  
Chunyan Zhang

Burr formation is a common phenomena in metal cutting. The burr not only effect precision of parts directly but influence the assembly quality badly. Therefore, the control and deburring technology of machining burrs has become one of the key problem in precision or ultra-precision and automatic procession. In traditional drilling, the exit burr is bigger than the entrance burr, and its hazard is more larger. Moreover deburring process is very complex. According to these status quo, a new method of active control of the exit burr is put forward using vibration drilling. Mechanism of chip broken and burr formation in vibration drilling are analysed systematically and an equipment of vibration drilling is developed based on drilling experiment. Cutting test on A3 material, brass (H62) and 1Cr18Ni9Ti stainless steel is carried out using the method of vibration drilling. As a result, cutting character is improved because of the using of this method. Also, machining accuracy and surface integrality of parts are improved remarkably and the size of the exit burr is controlled effectively in vibration drilling. The development of vibration drilling device provides a new approach for the progress of ultra-precision drilling technology. Vibration drilling device and technology developed in this study can be widely used to ultra-precision machining.


2007 ◽  
Vol 359-360 ◽  
pp. 274-278
Author(s):  
Li Hua Dong ◽  
Chun Hua Fan ◽  
Jian Huang ◽  
Hong Xia Luo

The application of hard and brittle materials become wider and wider because its self-characteristics. It is used widely in finish machining of products, such as memory record device, information products, precision instrument, etc. Traditional grinding-polishing methods have not suited for precision machining requirements of hard and brittle materials. Carbide and ceramic are chosen as workpiece. Diamond polishing film is chosen as polishing tool. Polishing experiments are done by using self-made film polishing machine with high speed and cooling inside. Polishing mechanism and polishing technology of what polishing film polishes hard and brittle materials will be studied by changing polishing speed and diamond grain size and so on. The experimental study of wear shape of gringding grain, desquamation process of grain and surface quality of workpiece will be done in this paper so that the reasonable technology of polishing hard and brittle materials with high productivity is obtained. It enrich and perfect the ultra-precision machining theory. A new method of ultra-precision lapping and polishing of hard and brittle materials is provided.


2012 ◽  
Vol 516 ◽  
pp. 551-556
Author(s):  
Thanh Hung Duong ◽  
Kim Huyn Chul ◽  
Lee Dong Yoon

In recent years, there have been many studies concerning the effect of cutting parameters and tool parameters on the ultra precision machining of electroless nickel. However, there is no known reported study on the relationship between the cutting force and tool rake angle in ultra precision machining of electroless nickel. The objective of this study is to compare and investigate the cutting force with various rake angles for micro machining electroless nickel work pieces by theoretical analysis and experiment. Diamond tools with rake angles of-10o, 0o and 10o were used in the experiment. According to theoretical analysis, the tool with a 10o rake angle induces the smallest cutting force. However, the experiment showed that the tool with zero rake angle always gave us the smallest cutting force for all cutting speeds, cutting depths and pattern pitches.


2021 ◽  
Vol 9 ◽  
Author(s):  
Chengyuan Yao ◽  
Wanfu Shen ◽  
Xiaodong Hu ◽  
Chunguang Hu

The sesquioxide Lu2O3 single crystal has attracted tremendous attention as potential host material for high-power solid-state lasers. As polishing is the terminal process of conventional ultra-precision machining, the quality of polished crystal directly impacts the crucial performance indicators of optics. The high melting point of Lu2O3 single crystal makes crystal preparation difficult. Therefore, investigations on the surface/subsurface quality inspection of polished Lu2O3 single crystal are scarce. In this paper, we utilize the quasi-Brewster angle technique (qBAT) based on ellipsometry to inspect the quality of polished Lu2O3 single crystal, achieving fast, non-destructive, and high-sensitive surface/subsurface damage assessment. A systematic crystal processing scheme is designed and polished Lu2O3 crystal samples are obtained. To verify the results of qBAT, the surface and subsurface quality are tested using optical profilometer and transmission electron microscope, respectively. The consistency of the test results demonstrates the feasibility, high sensitivity, and accuracy of the qBAT. To our knowledge, this is the first time that the qBAT is applied to investigate the polished surface/subsurface quality of Lu2O3 single crystal. In conclusion, this method provides a powerful approach to the high-precision characterization of the surface/subsurface quality of Lu2O3 single crystal, and has significant potential for material property study and process optimization during ultra-precision machining.


Author(s):  
Qiang Cheng ◽  
Qiunan Feng ◽  
Zhifeng Liu ◽  
Peihua Gu ◽  
Ligang Cai

Geometric error has significant influence on the processing results and reduces machining accuracy. Machine tool geometric errors can be interpreted as a deterministic value with an uncertain fluctuation of probabilistic distribution. Although, the uncertain fluctuation can not be compensated, it has extremely profound significance on the precision and ultra-precision machining to reduce the fluctuation range of machining accuracy as far as possible. In this paper, a typical 3-axis machine tool with high precision is selected and the fluctuations in machining accuracy are studied. The volumetric error modeling of machine tool is established by multi-body system (MBS) theory, which describes the topological structure of MBS in a simple and convenient matrix form. Based on the volumetric error model, the equivalent components of the errors for the three axes are established by reducing error terms. Then, the fluctuations of equivalent errors and the machining accuracy in working planes are depicted and predicted using the theory of stochastic process, whose range should be controlled within a certain confidence interval. Furthermore, the critical geometric errors that have significant influence on the machining accuracy fluctuation are identified. Based on the analysis results, some improvement in the machine tool parts introduced and the results for the modified machine show that the prediction allow for reduction in errors for the precision and ultra-precision machining.


2012 ◽  
Vol 516 ◽  
pp. 42-47
Author(s):  
Sun Choel Yang ◽  
Geon Hee Kim ◽  
Myung Sang Huh ◽  
Sang Yong Lee ◽  
Sang Hyuk Kim ◽  
...  

The Winston cone baffle was developed for the space observation camera of the MIRIS (Multi-purpose Infrared Imaging System) which is the main payload of STSAT-3 (Science and Technology Satellite). The Winston cone baffle reduces the orbital heat load to the STSAT-3 and is thermally connected to the radiator to cool down. The jig and ultra precision machining jig was designed using a 3D modelling program and analyzed using a computer aided engineering program (ANSYS). The reasons for designing the jig for the baffle were to enhance the stability of the machining and improve the form accuracy of the baffle. The strength, weight and barycentre of the jig are investigated to find the optimized ultra precision machining conditions. To maintain the weight balance of the baffle at high speed rotation, there are lots of holes that can be inserted by heavier bolts. Vibration of the natural diamond bite tool is reduced by using thin copper pipe and urethane silicone. Using this bite tool, we could decrease patterns on the surface of the Winston cone baffle. The results of the simulation using ANSYS show that maximum deformation of the baffle is less than the tolerance limit. Surface roughness of the fabricated Winston cone baffle is machined with the jig and the machining tool is under 5 nm. The Winston cone baffle is plated with gold after being electroless plated with nickel. This baffle is applied to the flight model of the MIRIS.


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