scholarly journals μ-Coriolis Mass Flow Sensor with Resistive Readout

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 184
Author(s):  
Thomas Schut ◽  
Remco Wiegerink ◽  
Joost Lötters
Keyword(s):  
Mass Flow ◽  
Flow Sensor ◽  
Strain Gauges ◽  
External Disturbances ◽  
Fluidic Channel ◽  
Present Measurement ◽  
Coriolis Forces ◽  
Measurement Results ◽  
Metal Strain ◽  
Mass Flow Sensor

This paper presents a μ -Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows for actuation at much higher amplitudes than for a capacitive readout, resulting in correspondingly larger Coriolis forces in response to fluid flow. A resistive readout can be operated in two actuation vibrational modes. A capacitive readout can only be operated in one of these two modes, which is more sensitive to external disturbances. Three types of devices have been realized. We present measurement results for all three devices. One device clearly outperforms the other two, with a flow sensitivity of 2.22 °/(g·h−1) and a zero-flow stability of 0.02 g·h−1 over 30 min. Optimization of the metal strain gauges and/or implementation of poly-Silicon strain gauges could further improve performance.

Development of a mass flow sensor based on Low Temperature Cofired Ceramics for analysis of exhaust gas up to 500 °C

2020 ◽  
Author(s):  
Lohrberg Carolin ◽  
Lenz Christian ◽  
Kreher Lisa ◽  
Bechtold Franz ◽  
Carstens Stefan ◽  
...  
Keyword(s):  
Low Temperature ◽  
Mass Flow ◽  
Flow Sensor ◽  
Exhaust Gas ◽  
Cofired Ceramics ◽  
Mass Flow Sensor

µ-Coriolis Mass Flow Sensor with Differential Capacitive Readout

2020 ◽  
pp. 1-1
Author(s):  
Thomas V.P. Schut ◽  
Remco J. Wiegerink ◽  
Joost C. Lotters
Keyword(s):  
Mass Flow ◽  
Flow Sensor ◽  
Mass Flow Sensor

scholarly journals Micro Coriolis MASS flow sensor driven by integrated PZT thin film actuators

2018 ◽  
Author(s):  
Y. Zeng ◽  
J. Groenesteijn ◽  
D. Alveringh ◽  
R.J.A. Steenwelle ◽  
K. Ma ◽  
...  
Keyword(s):  
Thin Film ◽  
Mass Flow ◽  
Flow Sensor ◽  
Pzt Thin Film ◽  
Mass Flow Sensor

Parametric amplification in a micro Coriolis mass flow sensor: Reduction of power dissipation without loss of sensitivity

2013 ◽  
Author(s):  
Jarno Groenesteijn ◽  
Harmen Droogendijk ◽  
Remco J. Wiegerink ◽  
Theo S. J. Lammerink ◽  
Joost C. Lotters ◽  
...  
Keyword(s):  
Mass Flow ◽  
Power Dissipation ◽  
Parametric Amplification ◽  
Flow Sensor ◽  
Sensor Reduction ◽  
Mass Flow Sensor

Development of a Surface Flow Sensor for Measuring Turbulent Drag Force

2019 ◽  
Author(s):  
Il Doh ◽  
Il-Bum Kwon ◽  
Jiho Chang ◽  
Sejong Chun
Keyword(s):  
Wind Tunnel ◽  
Flow Velocity ◽  
Drag Force ◽  
Mass Flow ◽  
Surface Flow ◽  
Flow Sensor ◽  
Constant Current ◽  
Thermal Mass ◽  
Turbulent Drag ◽  
Mass Flow Sensor

Abstract A surface flow sensor is needed if turbulent drag force is to be measured over a vehicle, such as a car, a ship, and an airplane. In case of automobile industry, there are no automobile manufacturers which measure surface flow velocity over a car for wind tunnel testing. Instead, they rely on particle image velocimetry (PIV), pressure sensitive paint (PSP), laser Doppler anemometry (LDA), pitot tubes, and tufts to get information regarding the turbulent drag force. Surface flow sensors have not devised yet. This study aims at developing a surface flow sensor for measuring turbulent drag force over a rigid body in a wind tunnel. Two sensing schemes were designed for the fiber-optic distributed sensor and the thermal mass flow sensor. These concepts are introduced in this paper. As the first attempt, a thermal mass flow sensor has been fabricated. It was flush-mounted on the surface of a test section in the wind tunnel to measure the surface flow velocity. The thermal mass flow sensor was operated by either constant current or constant resistance modes. Resistance ratio was changed as the electric current was increased by the constant current mode, while power ratio was saturated as the resistance was increased by the constant resistance mode. Either the resistance ratio or the power ratio was changed with the flow velocity measured by a Pitot tube, located at the center of test section.

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