scholarly journals Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 178 ◽  
Author(s):  
Cacie Hart ◽  
Swaminathan Rajaraman
Keyword(s):  
Laser Micromachining ◽  
Direct Write ◽  
Electrode Gap ◽  
Interdigitated Electrode ◽  
Microfabrication Technology ◽  
Gap Width ◽  
532 Nm ◽  
Comprehensive Characterization ◽  
Ablation Characteristics

Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton® and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 µm feature sizes and interdigitated electrode (IDE) fabrication down to 7 µm electrode gap width.

scholarly journals Impedimetric Characterization of Interdigitated Electrode Arrays for Biosensor Applications

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 899 ◽  
Author(s):  
Elisabeth Kostal ◽  
Stephan Kasemann ◽  
Can Dincer ◽  
Stefan Partel
Keyword(s):  
Electrochemical Impedance Spectroscopy ◽  
Impedance Spectroscopy ◽  
Electrochemical Impedance ◽  
Gap Size ◽  
Electrode Arrays ◽  
Electrode Gap ◽  
Interdigitated Electrode ◽  
Eis Measurements ◽  
Biosensor Applications

We present recent results of the electrochemical impedance spectroscopy (EIS) measurements for interdigitated electrode arrays (IDAs) ranging from several micrometers down to hundreds of nanometers. Simulations have shown that the electric field strength between the electrodes scales with the gap size. Therefore, electrodes of varying gap sizes were fabricated and functionalized with ssDNA to empirically validate these findings. The results have shown that the impedimetric response strongly correlates with the width of the electrode fingers: the smaller the electrode gap, the larger the impedance increase.

Novel Sensor Fabrication Using Direct-Write Thermal Spray and Precision Laser Micromachining

2004 ◽  
Vol 126 (4) ◽  
pp. 830-836 ◽  
Author(s):  
Q. Chen ◽  
T. Tong ◽  
J. P. Longtin ◽  
S. Tankiewicz ◽  
S. Sampath ◽  
...  
Keyword(s):  
Thermal Spray ◽  
Thermal Characterization ◽  
Laser Micromachining ◽  
Direct Write ◽  
Additive Process ◽  
Pattern Design ◽  
Sensor Fabrication ◽  
Rapid Prototyping And Manufacturing ◽  
Functional Components

This work presents a direct-write technique for rapid prototyping and manufacturing of sensors onto structural and functional components for many diverse applications. The technique combines thermal spray (an additive process), which produces blanket depositions of films and coatings, with ultrafast laser micromachining (a subtractive process) to produce functional sensors. Microheaters and strain gauges have been successfully fabricated in this work to demonstrate the feasibility and advantages of the proposed technique. Electrical and thermal characterization of the sensors is also performed. With minor modifications to the pattern design and processing procedures, additional sensing structures and electronic components, for example, precision resistors and interdigitated capacitors, can be fabricated using the presented technique.

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