Optoelectronic Properties and the Electrical Stability of Ga-Doped ZnO Thin Films Prepared via Radio Frequency Sputtering

Shien-Uang Jen; Hui Sun; Hai-Pang Chiang; Sheng-Chi Chen; Jian-Yu Chen; Xin Wang

doi:10.3390/ma9120987

Optoelectronic Properties and the Electrical Stability of Ga-Doped ZnO Thin Films Prepared via Radio Frequency Sputtering

Materials ◽

10.3390/ma9120987 ◽

2016 ◽

Vol 9 (12) ◽

pp. 987 ◽

Cited By ~ 10

Author(s):

Shien-Uang Jen ◽

Hui Sun ◽

Hai-Pang Chiang ◽

Sheng-Chi Chen ◽

Jian-Yu Chen ◽

...

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Zno Thin Films ◽

Electrical Stability ◽

Radio Frequency Sputtering ◽

Doped Zno

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Biaxial stress and optoelectronic properties of Al-doped ZnO thin films deposited on flexible substrates by radio frequency magnetron sputtering

Applied Optics ◽

10.1364/ao.56.00c163 ◽

2016 ◽

Vol 56 (4) ◽

pp. C163 ◽

Cited By ~ 8

Author(s):

Hsi-Chao Chen ◽

Po-Wei Cheng ◽

Kuo-Ting Huang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Biaxial Stress ◽

Zno Thin Films ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno

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Influence of Substrate-Target Distance on Structural and Optical Properties of Ga and (Al + Ga)-doped ZnO Thin Films Deposited by Radio Frequency Sputtering

Analytical Letters ◽

10.1080/00032719.2019.1606819 ◽

2019 ◽

Vol 52 (14) ◽

pp. 2227-2238

Author(s):

M. Toma ◽

D. Marconi ◽

Mariana Pop ◽

C. Lung ◽

A. Pop

Keyword(s):

Thin Films ◽

Optical Properties ◽

Radio Frequency ◽

Target Distance ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Radio Frequency Sputtering ◽

Doped Zno ◽

Influence Of Substrate

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Control of p- and n-type conductivities in P doped ZnO thin films by using radio-frequency sputtering

Applied Physics Letters ◽

10.1063/1.2192089 ◽

2006 ◽

Vol 88 (13) ◽

pp. 132114 ◽

Cited By ~ 45

Author(s):

Zhi Gen Yu ◽

Ping Wu ◽

Hao Gong

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Zno Thin Films ◽

Radio Frequency Sputtering ◽

Doped Zno

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Transparent Conductive and Wide Band Gap Characteristics of Quaternary Mg and Al Co-Doped ZnO Thin Films Prepared by Radio Frequency Sputtering Method

Science of Advanced Materials ◽

10.1166/sam.2016.2527 ◽

2016 ◽

Vol 8 (3) ◽

pp. 669-674 ◽

Cited By ~ 2

Author(s):

Ki Seok Jeon ◽

M. P. Suryawanshi ◽

In Young Kim ◽

Jun Sung Jang ◽

Jae Ho Yun ◽

...

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Band Gap ◽

Wide Band ◽

Zno Thin Films ◽

Wide Band Gap ◽

Radio Frequency Sputtering ◽

Gap Characteristics ◽

Doped Zno ◽

Co Doped

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Cu doping effects on the electronic and optical properties of Cu-doped ZnO thin films fabricated by radio frequency sputtering

Thin Solid Films ◽

10.1016/j.tsf.2012.11.046 ◽

2013 ◽

Vol 547 ◽

pp. 285-288 ◽

Cited By ~ 30

Author(s):

Nark-Eon Sung ◽

Seen-Woong Kang ◽

Hyun-Joon Shin ◽

Han-Koo Lee ◽

Ik-Jae Lee

Keyword(s):

Thin Films ◽

Optical Properties ◽

Radio Frequency ◽

Zno Thin Films ◽

Cu Doping ◽

Electronic And Optical Properties ◽

Radio Frequency Sputtering ◽

Doping Effects ◽

Doped Zno

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Cu-Doped ZnO Thin Films Grown by Co-deposition Using Pulsed Laser Deposition for ZnO and Radio Frequency Sputtering for Cu

Journal of Electronic Materials ◽

10.1007/s11664-018-6326-2 ◽

2018 ◽

Vol 47 (8) ◽

pp. 4610-4614 ◽

Cited By ~ 1

Author(s):

Hyun Wook Shin ◽

Jong Yeog Son

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Thin Films ◽

Radio Frequency Sputtering ◽

Doped Zno

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Structures and properties of the Al-doped ZnO thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.03.026 ◽

2011 ◽

Vol 519 (16) ◽

pp. 5577-5581 ◽

Cited By ~ 26

Author(s):

Hongyun Yue ◽

Aimin Wu ◽

Yudong Feng ◽

Xueyu Zhang ◽

Tingju Li

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Structures And Properties ◽

Doped Zno

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Experimental and ab-initio investigation of the microstructure and optoelectronic properties of FCM–CVD-prepared Al-doped ZnO thin films

Applied Physics A ◽

10.1007/s00339-019-2947-4 ◽

2019 ◽

Vol 125 (9) ◽

Cited By ~ 5

Author(s):

Ilyass Jellal ◽

Hassan Ahmoum ◽

Yassine Khaaissa ◽

Khalid Nouneh ◽

Mourad Boughrara ◽

...

Keyword(s):

Thin Films ◽

Ab Initio ◽

Optoelectronic Properties ◽

Zno Thin Films ◽

Doped Zno

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Physical properties of Cu and Dy co-doped ZnO thin films prepared by radio frequency magnetron sputtering for hybrid organic/inorganic electronic devices

Thin Solid Films ◽

10.1016/j.tsf.2019.06.027 ◽

2019 ◽

Vol 685 ◽

pp. 379-384 ◽

Cited By ~ 2

Author(s):

C. Locovei ◽

D. Coman ◽

A. Radu ◽

L. Ion ◽

V.A. Antohe ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Electronic Devices ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

Co Doped

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Highly transparent and conductive group IV impurity‐doped ZnO thin films prepared by radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578678 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2975-2979 ◽

Cited By ~ 68

Author(s):

Hirotoshi Sato ◽

Tadatsugu Minami ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Group Iv ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Impurity Doped ◽

Doped Zno

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