scholarly journals Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering

Materials ◽  
2014 ◽  
Vol 7 (6) ◽  
pp. 4105-4117 ◽  
Author(s):  
Francisco López-Huerta ◽  
Blanca Cervantes ◽  
Octavio González ◽  
Julián Hernández-Torres ◽  
Leandro García-González ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Surface Properties ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films

The structure and photocatalytic activity of TiO2 thin films deposited by dc magnetron sputtering

2012 ◽  
Vol 52 (6) ◽  
pp. 1131-1142 ◽  
Author(s):  
W.J. Yang ◽  
C.Y. Hsu ◽  
Y.W. Liu ◽  
R.Q. Hsu ◽  
T.W. Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Photocatalytic Activity ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films

Ageing effects on electrical resistivity of Nb-doped TiO2 thin films deposited at a high rate by reactive DC magnetron sputtering

2018 ◽  
Vol 455 ◽  
pp. 267-275 ◽  
Author(s):  
Davide Casotti ◽  
Valentina Orsini ◽  
Alessandro di Bona ◽  
Sandra Gardonio ◽  
Mattia Fanetti ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
High Rate ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
Ageing Effects

Surface properties of doped and undoped TiO2 thin films deposited by magnetron sputtering

Vacuum ◽  
2009 ◽  
Vol 83 (10) ◽  
pp. 1303-1306 ◽  
Author(s):  
J.O. Carneiro ◽  
V. Teixeira ◽  
A.J. Martins ◽  
M. Mendes ◽  
M. Ribeiro ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Surface Properties ◽  
Tio2 Thin Films ◽  
Undoped Tio2

Effect of Coating Thickness (25–100 nm) on Properties of TiO2 Thin Films Prepared by DC Magnetron Sputtering with a TiO2 Target and Post-Annealing Process

2018 ◽  
Vol 24 (11) ◽  
pp. 8930-8934
Author(s):  
Noormariah Muslim ◽  
Muhammad Nur Syafi’ie Md Idris ◽  
Ying Woan Soon ◽  
Chee Ming Lim ◽  
Nyuk Yoong Voo
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Coating Thickness ◽  
Annealing Process ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Post Annealing

Structural and surface properties of TiO2 thin films doped with neodymium deposited by reactive magnetron sputtering

2013 ◽  
Vol 31 (1) ◽  
pp. 71-79 ◽  
Author(s):  
Michał Mazur ◽  
Danuta Kaczmarek ◽  
Jarosław Domaradzki ◽  
Damian Wojcieszak ◽  
Piotr Mazur ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Surface Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films

Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power impulse magnetron sputtering

2011 ◽  
Vol 1352 ◽  
Author(s):  
F. Magnus ◽  
B. Agnarsson ◽  
A. S. Ingason ◽  
K. Leosson ◽  
S. Olafsson ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Film Thickness ◽  
High Power ◽  
Amorphous Matrix ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Temperature Range ◽  
Order Of Magnitude

ABSTRACTThin TiO2 films were grown on Si(001) and SiO2 substrates by reactive dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) at temperatures ranging from 300 to 700 °C. Both dcMS and HiPIMS produce polycrystalline rutile TiO2 grains, embedded in an amorphous matrix, despite no postannealing taking place. HiPIMS results in significantly larger grains, approaching 50% of the film thickness at 700 °C. In addition, the surface roughness of HiPIMS-grown films is below 1 nm rms in the temperature range 300–500 °C which is an order of magnitude lower than that of dcMS-grown films. The results show that smooth, rutile TiO2 films can be obtained by HiPIMS at relatively low growth temperatures, without postannealing.

Visible light-active nitrogen-doped TiO2 thin films prepared by DC magnetron sputtering used as a photocatalyst

2008 ◽  
Vol 33 (2) ◽  
pp. 277-281 ◽  
Author(s):  
K. Prabakar ◽  
T. Takahashi ◽  
T. Nezuka ◽  
K. Takahashi ◽  
T. Nakashima ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Visible Light ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Active Nitrogen ◽  
Doped Tio2 ◽  
Nitrogen Doped ◽  
Visible Light Active
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